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| Steppers and Scanners | Semiconductor Inspection Equipment and Measuring Instruments | Microscopes and Others | |
|---|---|---|---|
| 1910s | |||
| 1920s | •Microscope Model JOICO (1925) | ||
| 1930s | •Microscope Model NIKKO (1935) | ||
| 1940s | •Profile Projector Model l (1948) | •Microscope Model O (1948) •Microscope Model K (1949) | |
| 1950s | •Polarizing Microscope Model POH (1952) •Stereoscopic Microscope Model SM (1954) •Microscope Model J (1955) •Microscope Model S (1956) | ||
| 1960s | •Rotary Encoder RIE (1968) | •Stereoscopic Zoom Microscope Model SMZ (1961) •Inverted Microscope Model MD (1964) •Differential Interference Contrast Microscopes Model T / Model R (1966) •Microscope Model L (1966) •Photo Slit Lamp Microscope (1966) •Universal Research Microscope APOPHOT (1967) •Projection Lensmeter P (1968) |
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| 1970s | •Began development of SR-1 Step-and-Repeat System (Entrusted by VLSI technology research group) (1976) •Completion of SR-1 (1978) |
•Photoelectric Linear Encoder (1971) •High-Temperature Microhardness Tester QM (1976) •Coordinate measuring machine CORDIMET (1977) •High-Precision Digital Position Readout Systems Position Scale (1977) •Digital Micrometer System Digimicro (1977) |
•Wide angle Fundus Camera Retinapan 45 (1971) •Microscopes BIOPHOT/METAPHOT (1976) •Biological Microscopes OPTIPHOT / LABOPHOT (1978) •IC Inspection Microscope OPTIPHOT-55 (1979) •Auto Refractometer NR-1000 (1979) |
| 1980 | •NSR-1010G (Resolution: 1.0µm) : First stepper made in Japan | •Profile Projector V-12 | •Photomicrographic Equipment Microflex / CCTV System •Inverted Research Microscope DIAPHOT TMD |
| 1981 | •NSR-1505G (Resolution: 1.2µm) •NSR-2005G (Resolution: 1.5µm) |
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| 1982 | •Production facilities for steppers completed in Yokohama Plant •The first stepper shipped to the United States |
•IC Wafer Inspection System OPTISTATION •Profile Projector V-10 |
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| 1983 | •Production space for steppers in Yokohama Plant expanded | •Photoelectric Rotary Encoders RMH Series •Measurescope 20 |
•Computer Edger CB-10 •Fundus Camera NFC-60 |
| 1984 | •NSR-1505G2A (Resolution: 1.0µm) •NSR-1505G3A (Resolution: 1.0µm) •NSR-1010i3 (Resolution: 0.8µm) |
•IC Wafer Inspection System OPTISTATION 2 •Profile Projector V-16E •Measurescope UM-3 •Edge Sensor ES-1 |
•Automated Image Analyzing System MAGISCAN 2 |
| 1985 | •NSR-HT3025G (Resolution: 2.0µm) | •Screen Sensor SS-1 •Rotary Encoders RXB Series •Digital Micrometer System Digimicro ME-50H/501 |
•3D Image Construction System COSMOZONE98 •Universal Research Microscope MICROPHOT-FX •Scanning Acoustic Microscope AMS-3200 •CCTV System DK-3001 •Automatic Edger SB-1 •Auto Refractometer NR-5000 |
| 1986 | •NSR-L7501G (for LCD) | •IC Wafer Macroscopic System MACROSTATION •IC Wafer Inspection System OPTISTATION-1A •CMM TRISTATION 600 Series / 800M •Sub-Micron Scales •Data Processor DP-300 •CMM TRISTATION 400F |
•Automated Image Analyzing System LUZEX2 / 2D •Universal Metallurgical Microscopes MICROPHOT FX-M / S-M •Fundus Camera NFC-50AF •Hand Edger HB-1 / 1V |
| 1987 | •NSR-1505G4B (Resolution: 0.9µm) •NSR-1505G4C (Resolution: 0.8µm) •SX-5 (Resolution: 0.5µm) •NSR-1505G4D (Resolution: 0.75µm) •Cumulative sales of steppers reached 1,000 units |
•Microscopic Inspection System L-MIC •Dual-Axis Photoelectric Autocollimator •Digital Micrometer Digimicro MH-15M •Non-Contact Automatic Coordinate Measuring Projector MZ-1 |
•Inverted Tissue Culture Microscope TMS-F •Ocular Lensmeters OL-7/8 |
| 1988 | •NSR-1505EX (Resolution: 0.5µm) •NSR-1505G5C (Resolution: 0.8µm) •NSR-1505G5D (Resolution: 0.75µm) •NSR-1505G6E (Resolution: 0.65µm) |
•Measurescopes MM-11 / 11B / 11U •Measurescopes MM-22 / 22U •Rotary Encoders HSR Series •Teaching CAD System |
•Biological Microscopes ALPHAPHOT 2 Series •Micromanipulator System NT-88 Series •Automated Image Analyzing System LUZEX3 •Universal Research Microscope MICROPHOT-FXA •Zoom Slit Lamp NS-1 •Automatic Edger CB-20 •Automatic Pattern Maker FP-30 |
| 1989 | •NSR-L1001G (for LCD) •NSR-1505i6A (Resolution: 0.65µm) •Cumulative sales of steppers reached 2,000 units •NSR-1755G7A (Resolution: 0.65µm) •Completion of the second phase of construction work for Kumagaya Plant |
•IC Wafer Inspection System OPTISTATION 3 •Rotary Encoder ZHR32400 |
•Auto Refractometer NR-5100 •Frame Selector NF-3000 |
| 1990 | •NSR-1755i7A (Resolution: 0.5µm) •FX-201B (for LCD) •NSR-2005G8C (Resolution: 0.55µm) •Completion of the new building of Nikon Precision Inc. in Belmont, California, U.S.A. •Completion of the third phase of construction work for Kumagaya Plant |
•Measuring Microscope MM-100 •Non-Contact Probe NP-1 •Profile Projector V-12A |
•Stereoscopic Zoom Microscope SMZ-U •Biological Microscopes OPTIPHOT-2 / LABOPHOT-2 |
| 1991 | •NSR-1755EX8A (Resolution: 0.45µm) •NSR-2005i8A (Resolution: 0.5µm) •FX-301D (for LCD) •Completion of the new building of Tochigi Nikon for the production of lenses for steppers |
•Microscopic Inspection System L-MIC2 •High-Temperature Microhardness Tester QM-2 |
•Automatic Lensmeter NL-30 •Fundus Camera NF-505AF •Zoom-Photo Slit Lamp FS-3 |
| 1992 | •FX-401E / 402E (for LCD) •NSR-2005EX8A (Resolution: 0.4µm) •Cumulative sales of steppers reached 3,000 units •Completion of the fourth phase of construction work for No.6 Building of Kumagaya Plant |
•Microscope for LCD Substrate Inspection XD-10 (OPTIPHOTO 300D) •Microscope for LCD Substrate Inspection XD-20 (OPTIPHOTO 500) •Data Processor DP-302 •Position Scales VF1 / VFZ1 Series |
•Automated Image Analyzing System COSMOZONE R500 •Polarizing Microscope ALPHAPHOT-2 POL •Auto Refract-Keratometer NRK-8000 •High-Definition Color TV Camera HD-3000C |
| 1993 | •NSR-2005i9C (Resolution: 0.45µm) •FX-501D (for LCD) •NSR-TFH1 (for thin film magnetic heads) •NSR-2005i10C (Resolution: 0.45µm) •Moved Head Office of Nikon Precision Korea Ltd. (NPK) •Completion of new building of Nikon Precision Europe GmbH (NPE) in Langen, Germany |
•Macro/Microscopic Inspection System L-MAC •Video Measuring System VM-1 •CMM TRISTATION SH830 |
•Inverted Research Microscope DIAPHOT 300 •Auto Refractometer NR-5500 •Automatic Lensmeter NL-30P |
| 1994 | •NSR-4425i (Resolution: 0.8-0.7µm) •NSR-2005EX10B (Resolution: 0.32µm) •NSR-2005i11D (Resolution: 0.35µm) |
•Absolute Encoder MAR-H12 •Profile Projectors V-12B/V-10A |
•IC Inspection Microscopes OPTIPHOT200 / 150 / 100 •Real-Time Laser Confocal Microscope RCM8000 •Stereoscopic Zoom Microscope SMZ-10A |
| 1995 | •Cumulative sales of steppers reached 4,000 units •NSR-S201A (Resolution: 0.25µm) •Expansion of the cleanroom floor at No. 6 Building of Kumagaya Plant |
•Microscopic Inspection System L-MIC500 •CNC Video Measuring System VERITAS •High-Temperature Material Surface Evaluation System TS-1 •CNC Video Measuring System NEXIV VM-500N |
•Inverted Metallurgical Microscope EPIPHOT 300 / 200 •Hand-Held Refractometer Retinomax |
| 1996 | •NSR-2205EX12B (Resolution: 0.28µm) •NSR-2205i12D (Resolution: 0.35µm) •FX-601F (for LCD) •Cumulative sales of steppers reached 5,000 units |
•LCD Substrate Fine Pattern Metrology System L-NRM •IC Wafer Inspection System OPTISTATION V •Measuring Microscopes MM-40 / 60 Series |
•IC Inspection Confocal Microscope OPTIPHOT 200C •Biological Research Microscope ECLIPSE E800 •Photomicrographic Equipment FX-III Series U-III •Hand Held Auto Refract-Keratometer Retinomax K-plus |
| 1997 | •NSR-TFHi12 (for Magnetic heads) •NSR-S202A (Resolution: 0.25µm) •NSR-2205EX14C (Resolution: 0.25µm) •NSR-2205i14E (Resolution: 0.35µm) •Moved the Head Office of NPK •NPE established Training Center in Scotland |
•Wafer Loaders NWL-860TMB/TM/T •Data Processing Software DP-100C •Data Processor DP-303 •Profile Projector V-20B |
•Inverted Research Microscopes ECLIPSE TE300/200 •Biological Microscopes ECLIPSE E600 / 400 •Scanning Probe Microscope BioProbe •Automated Biological Microscope E1000 •Ophthalmic Console System OS-Wing/Auto Optester Remote Vision |
| 1998 | •NSR-S102B (Resolution: 0.35µm) •FX-701M (for LCD) •Success at the demonstrated feasibility of an electron optical system for EB steppers •NSR-S203B (Resolution: 0.18µm) •Completion of the fifth phase of construction work for No.7 Building of Kumagaya Plant |
•Inspection System LU2000-DUV •IC Wafer Inspection System OPTISTATION 7 •Digimicro MF-501 / 1001 •MFC-101 / TC-101 Counters |
•Metallurgical/Industrial Microscopes ECLIPSE ME600P / ME600D •Polarizing Microscopes ECLIPSE E600POL / E400POL •Auto Refractometer Speedy-1 |
| 1999 | •NSR-S302A (Resolution: 0.18µm) •NSR-S204B (Resolution: 0.18µm) •FX-21S (for LCD) •NSR-2205i14E2 (Resolution: 0.35µm) •NSR-S305B (Resolution:0.13µm) •Cumulative sales of steppers reached 6,000 units |
•CNC Video Measuring System NEXIV VM-1000N •Absolute Encoder MAR-M30 •CNC Video Measuring System NEXIV VMH-300N •Overlay Measurement System NRM-1000 |
•Stereoscopic Zoom Microscope SMZ800 •Stereoscopic Zoom Microscopes SMZ-645 / 660 •Digital Camera for Photomicrography COOLPIX Micro System III •Auto Refract-Keratometer Speedy-K •Hand-Held Auto Refractometer Retinomax 2 •Hand-Held Auto Refract-Keratometer Retinomax K-plus2 •Inverted Routine Microscopes ECLIPSE TS100 / 100-F |
| 2000 | •FX-702J (for LCD) •NSR-SF100 (Resolution: 0.4µm) •NSR-S205C (Resolution: 0.15µm) •Cleanroom at Tochigi Nikon expanded •Cleanroom at No. 7 Building of Kumagaya Plant expanded |
•Stereoscopic Zoom Microscope SMZ-1000 •IC Inspection Microscopes ECLIPSE L200 / L200D •Biological Microscope ECLIPSE E200 •Stereroscopic Zoom Microscope SMZ1500 •Digital Camera for Photomicrography DXM1200 •Digital Camera for Photomicrography COOLPIX Micro System IV •Automated IC Inspection Microscope ECLIPSE L200A |
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| 2001 | •Construction of crystal growing furnace for calcium fluoride crystal in Sagamihara Plant (Operations initiated in April, 2001) | •Overlay Measurement System NRM-1000A •Automatic Macro Inspection System AMI-2000 •CNC Video Measuring Systems NEXIV VMR Series |
•Industrial Microscopes ECLIPSE L150/L150A •Industrial Microscope ECLIPSE ME600L •Digital Network Camera DN100 |
| 2002 | •Cumulative sales of steppers reached 7,000 units •NSR-S306C (Resolution: 0.12μm) •NSR-S206D (Resolution: 0.11μm) •NSR-SF120 (Resolution: 0.28μm) •FX-801M (for LCD) |
•Automatic Macro Inspection System AMI-3000 •Overlay Measurement System NRM-3100 |
•Modular Confocal Microscope System DIGITAL ECLIPSE C1 |
| 2003 | •NSR-S306D (Resolution: 80nm) •FX-51S/61S (for LCD) •NSR-S307E (Resolution: 80nm) •NSR-S207D (Resolution: 0.11μm) •NSR-SF200 (Resolution: 0.15μm) |
•CNC Video Measuring System NEXIV VMR Series/NEXIV VMR TZ Series | •Digital Camera for Microscopes DS-5M-L1 •Digital Microscope COOLSCOPE |
| 2004 | •NSR-SF130 (Resolution: 0.28μm) •FX-53S/63S (for LCD) •NSR-S308F (Resolution: 65nm) |
•Advanced Research Microscope ECLIPSE 80i •Clinical & Laboratory Microscope ECLIPSE 50i/55i •Digital Sight Digital Camera DS-5Mc •Motorized Advanced Research Microscope ECLIPSE 90i •FPD/300mm Wafer Inspection Microscope ECLIPSE L300/L300D |
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| 2005 | •NSR-S208D (Resolution: 0.11μm) •FX-71S/FX-81S (for LCD) •NSR-SF140 (Resolution: 0.28μm) •Cumulative sales of steppers reached 8,000 units |
•CNC Video Measuring System NEXIV VMR-1515/12072 •CNC Video Measuring System Confocal NEXIV VMR-K3040ZC •High Performance Lens for CCD Cameras Nikon Rayfact 7x |
•True Spectral Imaging Confocal Lazer Scanning Microscope System DIGITAL ECLIPSE C1si •Digital Camera for Microscopes DS-2M •Industrial Microscopes ECLIPSE LV150A/150 •Industrial Microscopes ECLIPSE LV100D |
| 2006 | •NSR-S609B (Resolution: 55nm) | •Automatic Macro Inspection System AMI-3300 •Measuring Microscope MM-400/800 Series •High Performance Lens for CCD Cameras Nikon Rayfact 2x •High Performance Lens for CCD Cameras Nikon Rayfact 1x |
•Digital Camera for Microscopes DS-Fi1 •Cultivated Cells Observation System BioStation CT •Cells Time-lapse Imaging System BioStation IM •Multi-purpose Zoom Microscope MULTIZOOM AZ100 •Inverted Metallurgical Microscope ECLIPSE MA100 |
| 2007 | •NSR-S610C (Resolution: 45nm) •NSR-SF150 (Resolution 0.28μm) •NSR-SF155 (Resolution:280nm or better) •NES1-h02 (for Magnetic heads) |
•CNC Video Measuring System i NEXIV VMA-2520 •Industrial Lens Nikon Rayfact IL Series •Absolute Encoder MAR-MK32A •High Performance Lens for CCD Cameras Nikon Rayfact VL Series •Industrial Lens Nikon Rayfact VL Series •Absolute Linear Encoder SAL-S40A •Automated Pattern profile Monitoring System APM-3000 series •Automatic Macro Inspection System AMI-3400 |
•Inverted Research Microscope ECLIPSE Ti •Super high-definition cooled color camerahead–DS-Ri1 |
| 2008 | •NSR-S210D (Resolution:110nm) •NSR-S310F (Resolution: 65nm) (planned to start shipping) •FX-803M / 903N (for LCD) (planned to start shipping) |
•Wafer Loaders for IC Inspection Microscopes NWL200 Series | •Confocal Laser Scanning Microscope System A1 Series |
