Skip to sections.
Mar. 1998
Nikon Corporation has developed the Flat Panel Display Exposure System FX-701M, scheduled to go on sale on July 1, 1998.
The FX-701M uses a step-and-repeat system used to expose liquid-crystal display (LCD) circuit patterns and print them on glass plates.
It offers throughput about 30 % higher than previous Nikon models, enabling more efficient mass production of LCDs.
Development Background
The TFT (Thin-Film Transistor) active matrix color LCD first became extensively used as a VGA class displays (640 x 480 pixels) of 8- to 10-in. sizes for notebook PCs.
Display size has grown year after year with the most popular displays today being SVGA class (800 x 600 pixels) and XGA class (1,024 x 768 pixels) of 12-in. size, with increasing demand for 13- to 14-in.displays.
In addition, 15-in. and larger displays are expected to find applications as desktop color monitors, which should further expand the market.
The Nikon Flat Panel Display Exposure System FX-701M, due out shortly, can image 13- and 14-in. displays by splitting each display into four (4) exposures, achieving throughput improvement of about 30 % (compared to Nikon's predecessor models, for 13.3-in. panels).
For mass production of monitor displays, the FX-701M can image 17-in. displays by splitting each display into six (6) exposures.
In all, the power of the FX-701M boosts manufacturing effiency for TFT LCD displays.
Main Features
The new projection lens covers an exposure area of 132 x 132 mm (as compared to 120 x 120 mm with the previous lens) in one shot.
This means that all circuit patterns for a 14.1-in. panel can be printed in four (4) shots.
As a result, when exposing six (6) 13.3-in. displays on an single glass plate, throughput is about 30 % higher than that of previous Nikon models, and 350 such displays can be printed per hour.
Exposure area is extended to 132 x 132 mm, yet resolution is maintained at 2.4 microns or finer.
This resolution allows high speed production of LCDs of even higher definition.
Glass substrates as large as 600 x 720mm2 can be processed.
This enables imaging six (6) 14.1-in. displays or four (4) 17-in. displays on a single plate.
Ultra-large display panels of 36-in. class can also be manufactured.
The six (6)-reticle changer enables efficient printing of large displays --- for example, as few as six (6) shots are required per 17-in. display.
This option is particularly advantageous for the promising market of TFT LCDs for desktop color monitors.
Specifications
| Resolution | 2.4 micron or less (isolated pattern), 3 micron or less ( L / S ) |
|---|---|
| Exposure area | 132 x 132 mm to 105.87 x 153.75 mm (186.68 mm diameter) |
| Projection magnification ratio |
1.25 (enlargement) |
| Alignment accuracy | 0.5 micron or less |
| Maximum plate size | 600 x 720 mm2 |
| Reticle size | 6-in. |
| Options | Pellicle particle detector, Extended reticle library , Reticle barcode reader, Plate edge exposure system |
| Dimensions (WxDxH) and weight (approx.) |
Main body : 3,115 x 3,500 x 2,978 mm ; 10,700 kg Loader : 1,315 x 2,880 x 2,800 mm ; 1,500 kg Control rack : 630 x 2,100 x 2,100 mm ; 1,000 kg |
| The export of this product is controlled by Japanese Foreign Exchange Trade Law and International export control regime. They shall not be exported without authorization from the appropriate governmental authorities. Mar. 1998 |
