4. Supporting larger glass plates and higher definition panels

Today, the maximum size of a glass plate is the 10th generation plate, and the size of the Gen 10 plate is as wide as 3.13 x 2.88 meters.
Nikon supports this Gen 10 plate with the cutting-edge FX-101S, which is capable of efficiently producing large-size panels of more than 60 inches.

In order to manufacture high-definition FPDs, various technologies, including accurate exposure through lenses, accurate positioning of a glass plate, measurement and adjustment of distortion on the surface of a glass plate, are required. Nikon has independently developed these technologies and applied them to its FPD lithography systems to achieve high precision and high productivity at the same time.