Calcium Fluoride (NICF Series)

Nikon's calcium fluoride (NICF series) has been developed for lenses used in semiconductor lithography systems that require extreme precision and durability.
NICF series is a high-quality single crystal suitable for optical systems that use ultraviolet/infrared regions.

Optical grades and features

Grade Recommended wavelength Features
NICF-V VUV region ArF (193 nm) Highest grade within the NICF series; very high laser durability
Transmittance up to the vacuum ultraviolet region (≦200 nm) guaranteed
NICF-A ArF (193 nm) Transmittance up to ArF excimer laser (193 nm) guaranteed
NICF-U KrF (248 nm) Transmittance up to KrF excimer laser (248 nm) guaranteed
NICF-S Ultraviolet/visible regions Standard NICF series grade
Most suited to optical systems that use visible light or i-line (365 nm)
Visible/infrared regions Most suited to optical systems that use visible/infrared regions
NICF-V/A grade offers high transmittance and is suitable for both excimer lasers and the vacuum ultraviolet region.
Single crystal suitable for optical systems that use visible/infrared regions

Applications

  • Optics for ultraviolet and high-power lasers
  • Lens materials and optics for semiconductor and FPD lithography systems
  • Lens materials and optics for industrial inspection equipment
  • Camera lenses
  • Telescope lenses
  • *Please contact our sales department for further information on these and other applications

Transmittance range

  • *All data on this page are typical but not guaranteed values.
  • *Please ask about different sizes and specifications.

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