Synthetic Silica Glass for ArF Excimer Lasers (V/A Grade)

NIFS-V/A grade is a synthetic silica glass that has been developed to meet the demands of the most sophisticated state-of-the-art semiconductor lithography systems.
It realizes superior refractive index homogeneity, high transmittance and high durability, particularly with excimer lasers.

Outstanding features of NIFS-V/A grade

Transmittance and laser durability
Impurities in silica glass have been reduced to the utmost limit by selecting and managing high-purity raw materials, and by optimizing the manufacturing process. We have achieved excellent laser durability and high transmittance in the vacuum ultraviolet region.
Refractive index homogeneity
By managing the critical heat treatment process, we have achieved refractive index homogeneity excellence.

Transmittance properties (vacuum ultraviolet/ultraviolet regions)

NIFS-V/A shows exceptional transmittance characteristics, even in the vacuum ultraviolet region

Laser durability

High durability against ArF excimer laser irradiation and stable over the long term

NIFS-A measurement example

Change in laser-induced refractive index

High durability against ArF excimer laser irradiation and stable over the long term

NIFS-V measurement example

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