FPD/LSI Inspection Microscopes

ECLIPSE L300N / L300ND / L200N / L200ND

  1. Key Features
  2. Specifications/Dimensions
  3. Accessories

Objectives

Model Magnification NA Working Distance (mm)
CFI L Plan EPI 1x* 0.03 3.8
2.5xA 0.075 8.8
40x 0.65 1.0
CFI LU Plan Fluor EPI 5x 0.15 23.5
10x 0.30 17.5
20x 0.45 4.5
50x 0.80 1.0
100xA 0.90 1.0
CFI LU Plan EPI ELWD 20xA 0.40 13.0
50xA 0.55 10.1
100xA 0.80 3.5
CFI L Plan EPI SLWD 20xA 0.35 24.0
50xA 0.45 17.0
100xA 0.70 6.5
CFI LU Plan Apo EPI 100x 0.95 0.4
150x 0.95 0.3
CFI LU Plan Fluor BD 5x 0.15 18.0
10x 0.30 15.0
20x 0.45 4.5
50x 0.80 1.0
100xA 0.90 1.0
CFI LU Plan BD ELWD 20xA 0.40 13.0
50xA 0.55 9.8
100xA 0.80 3.5
CFI LU Plan Apo BD 100x 0.90 0.51
150x 0.90 0.4
  • *Requires use of polarizer/analyzer.

With correction mechanism CFI L Plan EPI CR series

Model Magnification NA Working Distance
(mm)
Glass Thickness Correction Range
(mm)
CFI L Plan EPI CR 20x 0.45 10.9-10.0 0-1.2
CFI L Plan EPI CR 50x 0.7 3.9-3.0 0-1.2
CFI L Plan EPI CRA 100x 0.85 1.2-0.85 0-0.7
CFI L Plan EPI CRB 100x 0.85 1.3-0.95 0.6-1.3
[fig.]
Without correction
[fig.]
With correction at 0.7 mm

Fluorescence filter blocks (L300N/L300ND/L200ND only)

  • C-FL UV-2A
  • C-FL V-2A
  • C-FL BV-2A
  • C-FL B-2A
  • C-FL G-2A
[fig.]
  • *Only one cube is attachable.
[fig.]
Brightfield
[fig.]
Epi-fluorescence UV-2A

DIC components

  • L2-PO polarizer
  • L2-RPO rotatable polarizer
  • L2-AN analyzer
  • L2-RAN rotary analyzer
  • L-DIC DIC prism
  • L-DIHC DIC prism HC (high-contrast)

Holders

[fig.]
200mm wafer holder

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