Large Stroke Model

NEXIV VMZ-R6555

  1. Key Features
  2. Specifications/Dimensions
  3. Software

Higher speeds and greater precision than ever before.

Magnification, AF and illumination conditions can be finely adjusted for each specimen.
VMZ-R6555 offers 650 x 550 mm stroke, which is suitable for large components and "step-and-repeat" measurements of multiple pieces on the stage.

Six Types of Optical Zooming Head

Standard magnification zooming heads: type 1 - 3

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. It comes with LED episcopic, diascopic and 8-segment ring illuminators with three incident angles.

High magnification zooming heads: type 4, TZ

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic, diascopic and 8-segment ring illuminators with 50-degree incident angles. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.

Wide field-of-view zooming head: type A

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic, diascopic and 8-segment ring illuminators with 18-degree incident angles.

Magnification vs. Field of view (mm)

Standard magnification zooming heads

Type 1
Optical magnification 0.5× 7.5×
Total magnification 18× 36× 72× 144× 270×
Field of View (mm) 9.33 × 7.01 4.7 × 3.5 2.33 × 1.75 1.165 × 0.875 0.622 × 0.467
Type 2
Optical magnification 15×
Total magnification 36× 72× 144× 288× 540×
Field of View (mm) 4.7 × 3.5 2.33 × 1.75 1.165 × 0.875 0.582 × 0.437 0.311 × 0.233
Type 3
Optical magnification 16× 30×
Total magnification 72× 144× 288× 576× 1080×
Field of View (mm) 2.33 × 1.75 1.165 × 0.875 0.582 × 0.437 0.291 × 0.218 0.155 × 0.117

High magnification zooming heads

Type 4
Optical magnification 16× 32× 60×
Total magnification 144× 288× 576× 1152× 2160×
Field of View (mm) 1.165 × 0.875 0.582 × 0.437 0.291 × 0.218 0.146 × 0.109 0.07 × 0.068
Type TZ
Optical magnification 7.5× 16× 32× 64× 120×
Total magnification 36× 72× 144× 270× 576× 1152× 2304× 4320×
Field of View (mm) 4.7 × 3.5 2.33 × 1.75 1.165 × 0.875 0.622 × 0.467 0.291 × 0.218 0.146 × 0.109 0.073 × 0.055 0.039 × 0.029

Wide field-of-view zooming head

Type A
Optical magnification 0.35× 0.6× 1.8× 3.5×
Total magnification 12.6× 21.6× 36× 64.8× 126×
Field of View (mm) 13.3 × 10 7.8 × 5.8 4.7 × 3.5 2.6 × 1.9 1.33 × 1
  • *Total magnification is that of a video window with 640 × 480 pixels on a 24-inch WUXGA monitor (1920 × 1200 pixels) recommended for the VMZ-R series.

Detection of 0.1 mm Transparent Layer

Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.

  • *Except for type A
[fig.]
Focus on top surface in red
[fig.]
Focus on bottom surface in blue
[fig.]
New TTL Laser AF
The new sensor detects laser beams reflected on both top and bottom surfaces.

8-segment Ring Illumination with Three Incident Angles

Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.

  • *The incident angle of the 8-segment ring illuminator for type 4 is 50 degrees and for type A is 18 degrees.

Measuring Accuracy is Further Improved

Measuring accuracy is further improved with high resolution linear encoder 'ModuRay' developed by Nikon.

Faster Throughput

High rate of data transfer combined with fast illumination control provides faster throughput.

15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (type 1 – 4).

[fig.]
0.5x
[fig.]
1x
[fig.]
2x
[fig.]
4x
[fig.]
7.5x

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