White Light Interferometric Microscope Systems

  1. Features
  2. Measurement capability
  3. Traceability
  4. Specifications/Dimensions
  1. SiC Wafer
  2. Razor-edge
  3. Paper
  4. Ceramics
  5. Synthesized diamond
  6. IC package

Sub-nano-level measurement in a wide range of magnifications

Subject: Silicon Carbide (SiC) Wafer

[fig.]
2015x2015μm

Sa 0.483nm
Sq 0.645nm
Sz 7.460nm

[fig.]
ΔH 1.677nm
[fig.]
1007x1007μm

Sa 0.302nm
Sq 0.401nm
Sz 11.187nm

[fig.]
ΔH 1.896nm
[fig.]
503x503μm

Sa 0.144nm
Sq 0.545nm
Sz 121.859nm

[fig.]
ΔH 1.929nm
[fig.]
251x251μm

Sa 0.237nm
Sq 0.374nm
Sz 7.090nm

[fig.]
ΔH 1.948nm
[fig.]
100x100μm

Sa 0.391nm
Sq 0.495nm
Sz 3.934nm

[fig.]
ΔH 1.949nm
[fig.]
50x50μm

Sa 0.306nm
Sq 0.398nm
Sz 3.264nm

[fig.]
ΔH 1.948nm