White Light Interferometric Microscope Systems

  1. Features
  2. Measurement capability
  3. Traceability
  4. Specifications/Dimensions
High Pixel Resolution Model
BW-S501 BW-S502 BW-S503 BW-S505 BW-S506 BW-S507
Measurement optical system Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm) 1 pm (0.001 nm)
Step height measurement reproducibility σ: 8 nm / 8 μm step height measurement
Number of pixels 2046 x 2046, 1022 x 1022 (selectable via software)
Height measurement time 38 s, 16 s / 10 μm scan
Height measurement range < 90 μm < 20 mm < 90 μm < 20 mm
Measurement field size (using 2.5X) < 4448 x 4448 μm *
Piezo actuator Objective lens driven Nosepiece driven
Z axis Manual Electric Manual Electric
XY axis Manual Electric Manual Electric
Software Bridgelements® software modules
High Speed Model
BW-D501 BW-D502 BW-D503 BW-D505 BW-D506 BW-D507
Measurement optical system Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm) 1 pm (0.001 nm)
Step height measurement reproducibility σ: 8 nm / 8 μm step height measurement
Number of pixels 510 x 510
Height measurement time 4 s / 10 μm scan
Height measurement range < 90 μm < 20 mm < 90 μm < 20 mm
Measurement field size (using 2.5X) < 2015 x 2015 μm *
Piezo actuator Objective lens driven Nosepiece driven
Z axis Manual Electric Manual Electric
XY axis Manual Electric Manual Electric
Software Bridgelements® software modules
  • *The range can be extended by changing the relay lens or by stitching.