White Light Interferometric Microscope Systems

  1. Features
  2. Measurement capability
  3. Traceability
  4. Specifications/Dimensions

Height calibration with the NIST-certified VLSI standard

[fig.]
503x503 μm
Repeatability
Unit: nm
1
2
3
4
5
6
7
8
9
10
8.869360
8.878740
8.958649
8.901088
8.878074
8.950821
8.930158
8.893693
8.900814
8.896667
AVE
STD
8.905806
0.030766