| This wafer loader handling 150/100mmø wafers features compact size and easy operation |
Simply use the touch keys on the control panel to perform the main operations of this wafer loader. A wealth of observation functions—such as high-speed wafer exchange of approximately 2 seconds and Nikon"s proprietary "fluttering" mode—offer comfortable, effortless macro inspections.
Dedicated micro inspection model: NWL641
Micro + macro inspection model: NWL641M
(The photo shows an example of a wafer loader combined with an IC inspection microscope.)
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