CNC Video Measuring System
NEXIV series designed for high-speed and accurate measurement of small to large workpieces using optical, laser, and touch probe sensors.
NEXIV VMZ-R SeriesA large stroke of 450 x 400 x 200mm allows high-precision, high-speed and easy measuring of various samples.
Ultrahigh-precision TypeUltrahigh-precision and general-purpose type appropriate as a master instrument Max. measurement range: 300 x 300 mm
Standard TypeApplicable to a wide range of measurements Max. measurement range: 300 x 200 mm
Large Stroke TypeEnables one-time measurement of multiple small parts Max. measurement range: 650 x 550 mm
Ultra-large Stroke TypeFor high-precision measurements of large substrates and LCD parts Max. measurement range: 1000 x 800 mm
Automated Wafer Measuring SystemFor use with Confocal NEXIV VMZ-K3040 Compatible with 300 mm wafers
Confocal NEXIVEnables high-precision 2D measurement and fine 3D shape evaluation Measurement range: 650 x 550 mm
Wafer Carrier Measuring SystemEnables fully automated non-contact measurement
Others
All New Video Measuring SystemCompact and lightweight, an entry level measurement instrument Max. measurement range: 250 x 200 mm
Quick reference chart
This chart helps selection of suitable stroke and magnification according to objects to be measured.

