Wafer Carrier Measuring System NEXIV VMR-C4540
| Compatible carriers (FOUP, FOSB, OC) |
SEMI-compliant ø300mm wafer carriers 200mm wafer carriers (with dedicated adapter) |
|
|---|---|---|
| Stroke | Measuring head (X x Y x Z) | 480 x 180 x 400 mm (18.9 x 7.1 x 15.7 in.) |
| Rotary table | 360° (in 90° increments) | |
| Minimum readout | 0.1µm | |
| Head travel speed | XZ axis: max. 200mm/s (7.9 in.) Y axis: max. 50mm/s (2.0 in.) |
|
Kinematic plate rotation speed |
90°/2 sec. | |
| Camera | B&W 1/2-in. CCD | |
| Optical magnification | 0.27X to 2.74X (5-step 10X zoom) | |
| Field of view | 20 x 16 mm to 2.0 x 1.6 mm | |
| Max. workpiece weight | 15kg (33.1 lb.) | |
| Measuring accuracy | (10 + 10L/1000)µm, L = measuring length in mm | |
| Repeatability (2σ) | 2µm | |
| Illumination | Episcopic, diascopic, darkfield | |
| Auto focus | Laser AF, Vision AF | |
| Power source | AC100-240V±10%, 50/60Hz | |
| Power consumption (approx.) | AC100-120V: 13A (main unit), 9A (PC) AC200-240V: 7A (main unit), 5A (PC) |
|
| Dimensions | 1400 (W) x 1739 (D) x 2530 (H) mm (55.1 x 68.5 x 99.6 in.) | |
| Weight | Approx. 1400kg (3086.41 lb.) | |
| Host computer | Windows® 7 PC | |
| Monitor | 19-in. TFT | |