Automated Wafer Measuring SystemNEXIV VMR-3020 with Wafer Loader NWL860T
| VMR-3020 + NWL860T | ||
|---|---|---|
| Compatible wafer sizes | ø150mm/200mm (SEMI/JEIDA compliant, silicon) | |
| Standard wafer carriers | Entegris® 150mm: PA182-60MB, 200mm: 192-80M | |
| Processing speed per carrier (Continuous transfer of 25 wafers) |
8 minutes + NEXIV's measurement time | |
| Orientation flat/notch detection | Non-contact, transmitted-type sensor | |
| Wafer transfer/chuck | Vacuum chuck, mechanical transfer | |
| Main unit dimensions (excluding PC rack) | 1700 (W) x 960 (D) x 1735 (H) mm (66.9 x 37.8 x 68.3 in.) | |
| Footprint (excluding areas for operation and maintenance) | 2750 (W) x 1100 (D) mm (108.3 x 43.3 in.) | |
| Main unit weight | Approx. 370kg (815.7 lb.) | |
| Requirements | Electricity | AC100-240V±10%, 50/60Hz, 11.5A max. |
| Vacuum | -800hPa (-600mmHg), 10NI/min. | |