White Light Interferometric Microscope System
Sub-nano-level measurement in a wide range of magnifications
Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer
2015x2015μm
Sa 0.483nm
Sq 0.645nm
Sz 7.460nm
ΔH 1.677nm
1007x1007μm
Sa 0.302nm
Sq 0.401nm
Sz 11.187nm
ΔH 1.896nm
503x503μm
Sa 0.144nm
Sq 0.545nm
Sz 121.859nm
ΔH 1.929nm
251x251μm
Sa 0.237nm
Sq 0.374nm
Sz 7.090nm
ΔH 1.948nm
100x100μm
Sa 0.391nm
Sq 0.495nm
Sz 3.934nm
ΔH 1.949nm
50x50μm
Sa 0.306nm
Sq 0.398nm
Sz 3.264nm
ΔH 1.948nm
Precise surface measurements for micrometer-range rough surfaces
Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering
ΔH 4.152μm