White Light Interferometric Microscope System

	High Speed Model
	BW-D501	BW-D502	BW-D503	BW-D505	BW-D506	BW-D507
Measurement optical system	Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm)	1 pm (0.001 nm)
Step height measurement reproducibility	σ: 3 nm / 8 μm step height measurement
Number of pixels	510 x 510
Height measurement time	4 s / 10 μm scan
Height measurement range	< 100 μm	< 20 mm		< 100 μm	< 20 mm
Measurement field size	< 2015 x 2015 μm ^*
Piezo actuator	Objective lens driven			Nosepiece driven
Z axis	Manual	Electric		Manual	Electric
XY axis	Manual		Electric	Manual		Electric
Software	Bridgelements^® software modules

	High Pixel Resolution Model
	BW-A501	BW-A502	BW-A503	BW-A505	BW-A506	BW-A507
Measurement optical system	Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm)	1 pm (0.001 nm)
Step height measurement reproducibility	σ: 3 nm / 8 μm step height measurement
Number of pixels	1398 x 1022 , 698 x 510 (selectable via software)
Height measurement time	26 s , 10 s / 10 μm scan
Height measurement range	< 100 μm	< 20 mm		< 100 μm	< 20 mm
Measurement field size	< 4093 x 2992 μm ^*
Piezo actuator	Objective lens driven			Nosepiece driven
Z axis	Manual	Electric		Manual	Electric
XY axis	Manual		Electric	Manual		Electric
Software	Bridgelements^® software modules