White Light Interferometric Microscope System
Height calibration with the NIST-certified VLSI standard
BW-D501 system
503x503 μm
| Unit: nm | |
|---|---|
| 1 2 3 4 5 6 7 8 9 10 |
8.869360 8.878740 8.958649 8.901088 8.878074 8.950821 8.930158 8.893693 8.900814 8.896667 |
| AVE STD |
8.905806 0.030766 |