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| New 300mm x 200mm Stage |
 Add body strength enables the use of larger stages, such as the newly developed 12x8 stages, allowing for larger workpieces. |
| MM Controller Backpack Interface |
 Illumination, X/Y stage and Z data can be connected to the MM Controller as an interface to an external computer running E-Max software for data processing and system control. |
| All White LED Illuminators |
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| High-intensity white LED illuminator is provided as standard for brightfield use . This illuminator feature no bulb replacement and constant color temperature, enabling measurement with high-precision and efficiency. |
| Non-Contact Height Measurement Technology FA Head TTL Laser AF for Universal Epi-Illuminator. |
| TTL Laser AF (Universal Type) This Laser AF system features a 0.5 second focusing speed with a repeatability as high as 0.5µm. Focusing Aid (FA) The newly developed split-prism Focusing Aid(FA) delivers sharp patterns to allow accurate focusing during Z-axis measurements. Measurements errors due to differences in the depth of focus of different objectives are minimized. |
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