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Confocal NEXIV VMR-K3040ZC

Confocal NEXIV NEXIV VMR-K3040ZC

Confocal NEXIV NEXIV VMR-K3040ZC

The Confocal NEXIV, a ground-breaking Multi-Functional video measuring system, was developed on the strength of Nikon’s leading opto-mechatronics technologies.
It incorporates confocal technology, brightfield with a 15X zoom, and TTL Laser AF. No matter what geometrical measurements you need—two-dimensional or three-dimensional—inspection and evaluation is exceptionally fast and accurate with this system! The Confocal NEXIV can be optimally used for measurements of a variety of bump heights on advanced IC packages such as wafer-level CSP, as well as for the inspection of highly complicated structures of MEMS and probe card.

Features

  • Market leading Non-Contact Video/Laser Measurement technologies
  • Newly developed High Speed Wide Area Height Measurement capability

High Precision Height Measurement

  • Height Measurement Repeatability: 0.35µm (2σ with 3x)
  • High Speed Height Measurement: 1.5 sec cycle time

Applications

  • IC Packages
    Flip Chip/COF(Bump)/COG
    CSP (FBGA)/SIP (Bump, Wire)
    Interposer (Pad height)
  • MEMS
  • Probe Card (Silicon Probe, Au Probe)
  • Precise Glass Components (Micro Lens, Contact Lens)
  • Photo Spacer Width/Height for Color Filter for FPD Panel

Measurement Examples

Bright Field
Bright Field		 Confocal Image
Confocal Image		 3D CF Image
3D CF Image
EDF Image
EDF Image		 CSP-Bump Height and Size
CSP-Bump Height and Size		 Bonding Wire-Loop Height
Bonding Wire-Loop Height

Specifications

Objective lens
Magnification 1.5x 3x 7.5x
W.D. 24mm 24mm 5mm
Confocal optics (area height measure)
Maximum scan height 1mm 1mm 1mm
Field of view 8mm x 6mm 4mm x 3mm 1.6mm x 1.2mm
Z measurement repeatability (2σ) 0.6µm 0.35µm 0.25µm

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