Large Stroke Type with Maximum Magnification Module NEXIV VMR-6555 Z120X

High-density PCBs
Exposure masks for substrates
Semiconductor packages (multiple pieces; 2D + height)
Photo plotter machines for masks

• Amazing 120X zoom
• Enables measurements of 1µm linewidths at the maximum magnification
• Laser AF perfect for measuring minuscule, complicated geometries
• High-speed stage and high-speed image processing provide high throughput

High-density PCB	LCD	Photo mask
HDD slider	HDD slider height gap profile	HDD head

Stroke (XxYxZ)
	With high magnification lens	650 x 550 x 150 mm (25.6 x 21.7 x 5.9 in.)
	With low magnification lens	600 x 550 x 150 mm (23.6 x 21.7 x 5.9 in.)
Minimum readout		0.1µm
Maximum workpiece weight		30kg (66.1 lb)
Measuring accuracy
	U1X, U1Y	1.5 + 2.5L/1000µm (with a workpiece max. 30kg)
	U2XY	2.5 + 2.5L/1000µm (with a workpiece max. 30kg)
Z-axis (L: Length in mm < W.D.)		1.5 + L/150µm
Camera		B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance		High mag. objective lens: 9.8mm Low mag. objective lens: 32mm
Magnification vs field of view		1 - 120X / 4.67 x 3.5 - 0.039 x 0.029 mm
Auto focus		TTL Laser AF and Vision AF
Illumination		Episcopic, diascopic (with high mag. head only), darkfield illumination
Power source		AC100-240V±10%, 50/60Hz
Power consumption		Max. 15A
Dimensions & weight
	Main unit & table	1220 (W) x 1680 (D) 1750 (H) mm, approx. 600kg (48.0 x 66.1 x 68.9 in., 1322.8 lb.)
	Controller	250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint		2400 (W) x 2000 (D) mm (94.5 x 78.7 in.)
Host Computer
Main unit		IBM PC/AT (Windows® XP)
Monitor		20-in. TFT color

*The "Z120X" type is equivalent to the "TZ" type in Japan.