Nikon exhibited in Hall 3, around which a group of front-end-related manufacturers exhibited, including a booth for photolithography process-related manufacturers. Nikon's booth was at the end of Hall 3, 3C-1101. We presented various products under the theme, "Total Output."
- Please check "Product Outlines" for details about exhibited products.
- In the VTR theater,
"NSR-S610C: The ArF immersion scanner boasts of the world's highest NA of 1.30" and "NSR-SF150: The Step-and Repeat Scanning System configured with sky-hook structure and light-weight wafer stage to achieve substantially reduced vibration and fastest possible stage transfer"
were shown continuously.
