Booth

Nikon Booth is located in [HALL 3], together with many other exhibit booths of pretreatment equipment and device components manufacturers.
Nikon Booth is at the farthest position (3C-1101). Under the theme of "Integrated Solution for the Future," products based on state-of-the-art technologies including IC steppers and scanners, semiconductor inspection equipment, FPD/300mm Wafer inspection microscopes and other related products as well as maintenance services are exhibited through the display of production machinery and equipment, panel presentations and video movie showing.

• Closeup

• The VTR theater provided in the Nikon Booth will show the explanatory video movies about the ArF Immersion Scanner NSR-S610C intended for mass production of the cutting-edge devices of 40nm generation, as well as ArF Scanner NSR-S310F, designed with the tandem stage having a proven track record in the immersion scanner, and other latest equipment.
• Please check "Product Outlines" for details about exhibited products.