To support 5th- and 6th-generation plate sizes for liquid crystal displays (LCDs), Nikon Corporation has developed the LCD Scanners FX-55S/65S. The sixth-generation system, FX-65S, supports a large 1500 x 1850mm plate. The FX-55S/65S systems form an image of a mask pattern, then transfer that image to a glass plate in a repeating step-and-scan process. The introduction of a multi-lens projection system enables efficient mass production of panels for 30-inch wide-screen TVs and contributes to significant improvements in productivity.
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| Resolution (L/S) (switchable) |
3µ or better (i-line),
3.5µm or better (g+h+i-line) |
| Projection magnification |
1:1 |
| Alignment accuracy |
0.6µm or better |
| Maximum plate size |
1300 x 1300mm (FX-55S)
1500 x 1850mm (FX-65S) |
| Mask size |
800 x 920mm, thickness: 10mm |
Tact time
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59 sec./plate (FX-55S)
67 sec./plate (FX-65S)
Conditions: 4 scans, g+h+
i-line, 30mJ/cm2 |
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Leaflet (198KB)