LCD Scanner FX-67S
The FX-67S enables high-resolution small and medium-sized panel manufacturing from large plates. It has improved productivity and offers excellent resolution and high alignment accuracy.
An optimal production line can be created by combining the FX-67S with the FX-66S.
| Resolution (L/S) | 2.0 µm (g+h+i-line) |
|---|---|
| Projection magnification | 1:1 |
| Alignment accuracy | ≦ ±0.5 µm |
| Maximum plate size | 1500 mm × 1850 mm |
| Tact time | 54 sec/plate Conditions: 1300 mm × 1500 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
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