To support 7th- and 8th-generation plate sizes for liquid crystal displays (LCDs), Nikon Corporation has developed the LCD Scanners FX-73S/83S. The eighth-generation system, FX-83S, supports the world’s largest 2200 x 2400mm-class plate. The FX-73S/83S systems form an image of a mask pattern, then transfer that image to a glass plate in a repeating step-and-scan process. The adoption of a multi-lens projection optical system enables efficient mass production of 40- to 50-inch wide-class panels for TVs and contributes to significant improvements in productivity.
|
|
 |
| Resolution (L/S) (switchable) |
3.5µm (g+h+i-line),
3µm (i-line) (option) |
| Projection magnification |
1:1 |
| Alignment accuracy |
0.6µm or better |
| Maximum plate size |
2000 x 2200mm class
(FX-73S)
2200 x 2400mm class
(FX-83S) |
| Mask size |
1220 x 1400mm |
Tact time
|
68 sec./plate (FX-73S)
72 sec./plate (FX-83S) Conditions: 4 scans, g+h+
i-line, 30mJ/cm2 |
|
|
|
|
Leaflet (205KB)