Perfect for the production of high-definition mid-to-small size liquid crystal displays (LCDs) for use in cellular phones, in-vehicle and similar equipment. The FX-803M was developed to meet growing demand for liquid crystal displays with “more beautiful” and “more vibrant” images. Its productivity has been increased by more than 10% over current systems in this class. Naturally, the FX-803M retains the high resolution and top-notch alignment accuracy that are hallmarks of Nikon’s repeating step-and-scan exposure system. With the FX-803M, productivity in mass-producing high-definition LCDs will top another high.
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| Resolution (L/S) |
3.0μm |
| Exposure field |
132 x 132mm |
| Exposure wavelength |
g+h line |
| Projection magnification |
1: 1.25 |
| Alignment accuracy |
0.38μm or better (3σ) |
Maximum plate size
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730 x 920mm |
| Reticle size |
6-in (0.25-in. thickness) |
| Tact time (30 shots) |
61 seconds (40mJ/cm2) |
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Leaflet (197KB)