Perfect for the production of high-definition mid-to-small size liquid crystal displays (LCDs) for use in cellular phones, in-vehicle and similar equipment. The FX-903N was developed to meet growing demand for liquid crystal displays with “more beautiful” and “more vibrant” images. Thanks to a newly developed large diameter i-line lens, the FX-903N delivers a stunning resolution of 1.5μm. Naturally, it features the high productivity and top-notch alignment accuracy that are hallmarks of Nikon’s repeating step-and-scan exposure system. With the FX-903N, fabrication of high-definition LCDs has undergone another evolution.
|
|
 |
| Resolution (L/S) |
1.5μm |
| Exposure field |
132 x 132mm |
| Exposure wavelength |
i-line (365nm） |
| Projection magnification |
1: 1.25 |
| Alignment accuracy |
0.30μm or better (3σ) |
Maximum plate size
|
730 x 920mm |
| Reticle size |
6-in. (0.25-in. thickness) |
| Tact time (30 shots) |
61 seconds (50mJ/cm2) |
|
|
|
|
Leaflet (197KB)