|
| FX-71S/81S |
| |
FX-71S |
FX-81S |
| Resolution (L/S) (switchable) |
3.5µm or better (g+h+i-line), 3µm (i-line) (option) |
| Projection magnification |
1:1 |
| Alignment accuracy |
0.6µm or better |
Maximum plate size
|
2000 x 2200mm class |
2200 x 2400mm class |
| Mask size |
1220 x 1400mm |
| Tact time |
74 sec./plate
Conditions: 4 scans, g+h+ i-line, 30mJ/cm2 |
75 sec./plate
Conditions: 4 scans, g+h+ i-line, 30mJ/cm2 |
|
| |
|
| FX-53S/63S |
| |
FX-53S |
FX-63S |
| Resolution (L/S) (switchable) |
3µ or better (i-line), 3.5µm or better (g+h+i-line) |
| Projection magnification |
1:1 |
| Alignment accuracy |
0.6µm or better |
Maximum plate size
|
1300 x 1300mm |
1500mm x 1850mm |
| Mask size |
800 x 920mm, thickness: 10mm |
| Tact time |
67 sec./plate
Conditions: 4 scans, g+h+ i-line, 30mJ/cm2 |
73 sec./plate
Conditions: 4 scans, g+h+ i-line, 30mJ/cm2 |
|
| |
|
| FX-801M |
| Resolution |
3µm or better (L/S) |
| Projection magnification |
1:1.25 |
| Exposure field |
132 x 132mm |
| Alignment accuracy |
0.4µm or better (3σ) |
| Maximum plate size |
730 x 920mm |
| Reticle size |
6-in. |
Tact time
|
89 sec./plate (42 shots) (30mJ/cm2) |
|
