The NSR-S307E, featuring a projection lens with the world’s top-class numerical aperture (0.85) and a 193nm-wavelength ArF excimer laser, is an ArF scanner designed for the mass production of advanced 80nm devices. The NSR-S307E also offers enhanced throughput and alignment accuracy thanks to a newly developed body.
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| Resolution |
80nm or better |
| NA |
0.85 |
| Exposure light source |
ArF excimer laser (193nm wavelength) |
| Reduction ratio |
1:4 |
| Exposure field |
26×33mm |
Alignment accuracy
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12nm or better  |
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Leaflet (281KB)