The NSR-S308F, an ArF scanner, features a projection lens which boasts the world's highest numerical aperture (0.92) supporting a 193nm-wavelength ArF excimer laser. The new scanner has been designed for the mass production of advanced 65nm devices with enhanced alignment precision and cost-efficiency.
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| Resolution |
65nm or better |
| NA |
0.92 |
| Exposure light source |
ArF excimer laser (193nm wavelength) |
| Reduction ratio |
1:4 |
| Exposure field |
26×33mm |
Alignment accuracy
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8nm or better  |
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Leaflet (319KB)