|
| NSR-TFHi12 |
| Resolution |
500nm or better |
| NA |
0.30 ~ 0.45 (variable) |
| Exposure light source |
i-line (365nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9(H) x 25.2(V)mm |
Alignment accuracy (EGA,  )
|
55nm or better |
|
| |
| NSR-2205i14E |
| Resolution |
350nm or better |
| NA |
0.63 |
| Exposure light source |
i-line (365nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9(H) x 25.2(V)mm |
Alignment accuracy (EGA, )
|
50nm or better |
| Alignment system |
LSA (standard), FIA (standard), LIA (optional) |
|
| |
|
| NSR-4425i |
| Resolution |
700nm |
| Exposure light source |
i-line (365nm) |
| Reduction ratio |
1:2.5 |
| Exposure field |
44mm square |
Alignment accuracy (EGA, )
|
100nm or better |
|
| |
| NSR-2205i11D |
| Resolution |
350nm or better |
| NA |
0.63 |
| Exposure light source |
i-line (365nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9(H) x 25.2(V)mm |
Alignment accuracy (EGA, )
|
70nm or better |
| Alignment system |
LSA (standard), FIA (optional), LIA (optional) |
|
