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vol.08

A Scene from Producing Steppers

In 1982, the dedicated stepper* factory in the Yokohama Plant began full operation. The stepper was in the spotlight as a key player in the semiconductor industry, and contributed greatly to various industries where semiconductors are used, such as PCs, TVs, and automobiles. The technology and knowhow accumulated in this field was applied to FPD lithography systems used in the production of displays for smartphones and tablet devices. After that, the FPT lithography business had grown into Nikon's main business, and is playing a role in today's ultra-smart society.

*A reduced projection exposure device that projects the image of a circuit in step-and-repeat method. It is a predecessor to today's semiconductor exposure equipment, which adopts a method used by scanners.

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