Synthetic Silica Glass Wafer
Synthetic silica glass wafer made of high-quality materials. We can provide high-precision large wafers with a minimum thickness of 0.4 mm, according to your requests.
- Made of high-quality synthetic silica glass
- Large sizes available (up to Φ300 mm)
- Available thickness (≧ 0.4 mm)
- Precision flatness and surface roughness
- Semiconductor processing
- MEMS (Micro Electro Mechanical Systems)
- HTPS (High Temperature Poly-Silicon)
- Φ200 mm
- Flatness (PV) ≦ 10 λ (λ=632.8 nm)
- Surface roughness (Ra) ≦ 0.001 μm
Example of specifications
|Dimensional Tolerance||Radial Direction||± 0.1 mm|
|Thickness Direction||± 0.02 mm|
|Flatness (PV)||≦ 10 λ (λ=632.8 nm)|
|TTV||≦ 2 μm|
|Surface Roughness (Ra)||≦ 0.001 μm|
|Scratch||Line width ≦ 10 μm|
|Dig||Diameter ≦ 10 μm|
|Chipping||≦ 200 μm (Edge line)|
- *All data on this page are typical but not guaranteed values.
- *Please ask about different sizes and specifications.
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N.B. Export of the products* on this page is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedure shall be required in case of export from Japan.
- *Products: Hardware and its technical information (including software)