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Samples are loaded and moved in an X/Y direction and the quantity of the movement is read.
Used in combination with a stage when rotating a sample.
These tables are used to rotate the sample and align it in the direction to which the stage moves.
Used to calibrate feeding accuracy of stage up to 300mm
The scale is made of low expansion glass to minimize thermal error. Both 10mm-interval sensor patterns and calibrations are provided.
Accuracy: within 1 μm against compensation values
Suitable for lot control of inspection data such as maximum value, minimum value, range, standard deviation, and process capability index.
OS: Windows® 7 or Windows® 10 ; Memory space: 512MB or more
Industrial Metrology : Top