Measuring Microscopes

MM-400/800 series

Nikon is proud to present the MM-400/800 series of Measuring Microscopes, which incorporate key performance features expected in an advanced measuring microscope:

Greater Accuracy
Digital Imaging and Vision Processing Metrology
Larger Stage for Increased Workpiece Handling
Non-Contact Z-height Measurements
Coordination with Data Processing Systems DP-E1A

10 Main Bodies Available for different applications
Measuring Microscope Features

10 Main Bodies available for different applications

For Large Stroke Stage (Max, 300mm x 200mm x 200mm)

MM-800/LM: Motorized Z Axis
MM-800/L: Built-in Z Linear Scale
MM-800: 2-Axis Measurement Model
MM-800/S: For 3rd Party DRO
MM-800/SL: For 3rd Party DRO with Built-in Z Linear Scale

For Smaller Stroke Stage (Max, 150mm x 100mm x 150mm)

MM-400/LM: Motorized Z Axis
MM-400/L: Built-in Z Linear Scale
MM-400: 2-Axis Measurement Model
MM-400/S: For 3rd Party DRO
MM-400/SL: For 3rd Party DRO with Built-in Z Linear Scale

Measuring Microscope Features

MM-400/800 Series

300mm x 200mm Stage

Added body strength enables the use of larger stages, such as the PS12x8C stage, allowing for larger workpieces.

MM Controller Backpack Interface

Illumination, X/Y stage, and Z data can be connected to the MM Controller as an interface to an external computer running E-Max software for data processing and system control.

All White LED Illuminators

[fig.] — High-intensity white LED illuminator is provided as standard for brightfield use. This illuminator features no bulb replacement and constant color temperature, enabling measurement with high-precision and efficiency.

Non-Contact Height Measurement Technology FA Head TTL Laser AF for Universal Epi-Illuminator

TTL Laser AF (Universal Type)
This Laser AF system features a 0.5 second focusing speed with a repeatability as high as 0.5μm.

Focusing Aid (FA)
The newly developed split-prism Focusing Aid (FA) delivers sharp patterns to allow accurate focusing during Z-axis measurements.
Measurement errors due to differences in the depth of focus of different objectives are minimized.