Measuring Microscopes
MM-400/800 series
MM-400/800 series incorporate key performance features expected in an advanced measuring microscope:
- Greater Accuracy
- Digital Imaging and Vision Processing Metrology
- Larger Stage for Increased Sample Handling
- Non-Contact Z-height Measurements
- Coordination with Data Processing Systems DP-E1A

10 Main Bodies available for different applications
- For Large Stroke Stage (Max, 300mm x 200mm x 200mm)
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- MM-800/LM: Motorized Z Axis
- MM-800/L: Built-in Z Linear Scale
- MM-800: 2-Axis Measurement Model
- MM-800/S: For 3rd Party DRO
- MM-800/SL: For 3rd Party DRO with Built-in Z Linear Scale
- For Smaller Stroke Stage (Max, 150mm x 100mm x 150mm)
-
- MM-400/LM: Motorized Z Axis
- MM-400/L: Built-in Z Linear Scale
- MM-400: 2-Axis Measurement Model
- MM-400/S: For 3rd Party DRO
- MM-400/SL: For 3rd Party DRO with Built-in Z Linear Scale
Features
300mm x 200mm Stage
Added body strength enables the use of larger stages, such as the PS12x8C stage, allowing for larger workpieces.

MM Controller Backpack Interface
Illumination, X/Y stage, and Z data can be connected to the MM Controller as an interface to an external computer running E-Max software for data processing and system control.

All White LED Illuminators
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Focusing Aid (FA)
Delivers sharp patterns to allow accurate focusing during Z-axis measurements.Measurement errors due to differences in the depth of focus of different objectives are minimized.
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Applications
Semiconductor packages, Bonding placement, Loop height, FPD panel (LCM) MEMS, Wafer level CSP, HDD sliders
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