Measuring Microscopes

MM-400/800 series

MM-400/800 series incorporate key performance features expected in an advanced measuring microscope:

  • Greater Accuracy
  • Digital Imaging and Vision Processing Metrology
  • Larger Stage for Increased Sample Handling
  • Non-Contact Z-height Measurements
  • Coordination with Data Processing Systems DP-E1A

10 Main Bodies available for different applications

For Large Stroke Stage (Max, 300mm x 200mm x 200mm)
  • MM-800/LM: Motorized Z Axis
  • MM-800/L: Built-in Z Linear Scale
  • MM-800: 2-Axis Measurement Model
  • MM-800/S: For 3rd Party DRO
  • MM-800/SL: For 3rd Party DRO with Built-in Z Linear Scale
For Smaller Stroke Stage (Max, 150mm x 100mm x 150mm)
  • MM-400/LM: Motorized Z Axis
  • MM-400/L: Built-in Z Linear Scale
  • MM-400: 2-Axis Measurement Model
  • MM-400/S: For 3rd Party DRO
  • MM-400/SL: For 3rd Party DRO with Built-in Z Linear Scale

Features

300mm x 200mm Stage

Added body strength enables the use of larger stages, such as the PS12x8C stage, allowing for larger workpieces.

MM Controller Backpack Interface

Illumination, X/Y stage, and Z data can be connected to the MM Controller as an interface to an external computer running E-Max software for data processing and system control.

All White LED Illuminators

[fig.]
High-intensity white LED illuminator is provided as standard for brightfield use. This illuminator features no bulb replacement and constant color temperature, enabling measurement with high-precision and efficiency.

Focusing Aid (FA)

Delivers sharp patterns to allow accurate focusing during Z-axis measurements.Measurement errors due to differences in the depth of focus of different objectives are minimized.

[fig.]
Focused
[fig.]
Front focus
[fig.]
Rear focus

Applications

Semiconductor packages, Bonding placement, Loop height, FPD panel (LCM) MEMS, Wafer level CSP, HDD sliders

[fig.]
Metalized Patterns of FPC
[fig.]
FFD - Cell Process
[fig.]
CCD
[fig.]
Color Filter
[fig.]
Brightfield
[fig.]
Darkfield
[fig.]
Brightfield
[fig.]
Epi-fluorescence
[fig.]
DIC

Related Products