Measuring Microscopes

MM-400/800 series

MM-400/800 series incorporate key performance features expected in an advanced measuring microscope:

  • Greater Accuracy
  • Digital Imaging and Vision Processing Metrology
  • Larger Stage for Increased Sample Handling
  • Non-Contact Z-height Measurements
  • Coordination with Data Processing Systems DP-E1A

10 Main Bodies available for different applications

For Large Stroke Stage (Max, 300mm x 200mm x 200mm)
  • MM-800/LM: Motorized Z Axis
  • MM-800/L: Built-in Z Linear Scale
  • MM-800: 2-Axis Measurement Model
  • MM-800/S: For 3rd Party DRO
  • MM-800/SL: For 3rd Party DRO with Built-in Z Linear Scale
For Smaller Stroke Stage (Max, 150mm x 100mm x 150mm)
  • MM-400/LM: Motorized Z Axis
  • MM-400/L: Built-in Z Linear Scale
  • MM-400: 2-Axis Measurement Model
  • MM-400/S: For 3rd Party DRO
  • MM-400/SL: For 3rd Party DRO with Built-in Z Linear Scale


300mm x 200mm Stage

Added body strength enables the use of larger stages, such as the PS12x8C stage, allowing for larger workpieces.

MM Controller Backpack Interface

Illumination, X/Y stage, and Z data can be connected to the MM Controller as an interface to an external computer running E-Max software for data processing and system control.

All White LED Illuminators

High-intensity white LED illuminator is provided as standard for brightfield use. This illuminator features no bulb replacement and constant color temperature, enabling measurement with high-precision and efficiency.

Focusing Aid (FA)

Delivers sharp patterns to allow accurate focusing during Z-axis measurements.Measurement errors due to differences in the depth of focus of different objectives are minimized.

Front focus
Rear focus


Semiconductor packages, Bonding placement, Loop height, FPD panel (LCM) MEMS, Wafer level CSP, HDD sliders

Metalized Patterns of FPC
FFD - Cell Process
Color Filter

Related Products