Two objective lenses, widefield and high power (NA of 0.55) are available. Combining the two objective lenses enable a broad array of applications ranging from widefield observations at low magnifications to accurate measurements at high magnifications.
Maximum magnification module Type TZ
The module achieves a wide magnification range from 1X to 120X by changing the optical path of the two objective lenses. Used in combination with 8-step zoom, it provides optimum magnifications in all applications from observations in wide fields of view at low magnifications to measurements of minuscule linewidths down to 1μm.
Field of view (mm)
*Total magnifications listed above represent those on the monitor screen when a 20" TFT monitor is set to the UXGA (1600 x 1200 pixels) mode.
*1X-7.5X when the low magnification lens is used, 16X - 120X with high magnification lens.
High-resolution TTL Laser AF with ultra tiny laser spot
The module comes with a high-resolution TTL Laser AF that incorporates high N.A. objectives and achieves ultra tiny laser spots. It significantly improves performance in focusing on and scanning over thin, transparent/semitransparent (e.g. resists) surfaces or irregular reflection surfaces. High-speed scanning measurement is possible at a rate of 1000 points per second max., enabling ultra-precise Z-axis measurements in a variety of applications.
Three illumination types
The module delivers the best illumination to any samples by providing three types of CNC controllable illuminations?episcopic, diascopic (high magnification head), and darkfield illuminations. This enables edges to be detected with high accuracy.
High-speed, high-precision Vision AF
Thanks to the adoption of a new algorithm and a progressive scan type of camera, Vision AF now provides greater speeds and accuracy closer to those with TTL Laser AF. Vision AF is convenient for applications where TTL Laser AF cannot be used, for example, when focusing on chamfered or round edges.