Large Stroke Model

NEXIV VMZ-R6555

  1. Key Features
  2. Specifications/Dimensions
  3. Software

Offering high precision for larger sample sizes

Suitable for large size components and/or "step-and-repeat" measurements of multiple pieces on the stage.

Six Types of Optical Zooming Head

Standard magnification zooming heads: Type 1, 2, 3

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.

High magnification zooming heads: Type 4 and Type TZ

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.

Wide field-of-view zooming head: Type A

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.

Magnification vs. Field of view (mm)

Standard magnification zooming heads

Type 1
Optical magnification 0.5× 7.5×
Total magnification 18× 36× 72× 144× 270×
Field of View (mm) 9.33 × 7.01 4.7 × 3.5 2.33 × 1.75 1.165 × 0.875 0.622 × 0.467
Type 2
Optical magnification 15×
Total magnification 36× 72× 144× 288× 540×
Field of View (mm) 4.7 × 3.5 2.33 × 1.75 1.165 × 0.875 0.582 × 0.437 0.311 × 0.233
Type 3
Optical magnification 16× 30×
Total magnification 72× 144× 288× 576× 1080×
Field of View (mm) 2.33 × 1.75 1.165 × 0.875 0.582 × 0.437 0.291 × 0.218 0.155 × 0.117

High magnification zooming heads

Type 4
Optical magnification 16× 32× 60×
Total magnification 144× 288× 576× 1152× 2160×
Field of View (mm) 1.165 × 0.875 0.582 × 0.437 0.291 × 0.218 0.146 × 0.109 0.07 × 0.068
Type TZ
Optical magnification 7.5× 16× 32× 64× 120×
Total magnification 36× 72× 144× 270× 576× 1152× 2304× 4320×
Field of View (mm) 4.7 × 3.5 2.33 × 1.75 1.165 × 0.875 0.622 × 0.467 0.291 × 0.218 0.146 × 0.109 0.073 × 0.055 0.039 × 0.029

Wide field-of-view zooming head

Type A
Optical magnification 0.35× 0.6× 1.8× 3.5×
Total magnification 12.6× 21.6× 36× 64.8× 126×
Field of View (mm) 13.3 × 10 7.8 × 5.8 4.7 × 3.5 2.6 × 1.9 1.33 × 1
  • *Total magnification is that of a video window with 640 × 480 pixels on a 24-inch WUXGA monitor (1920 × 1200 pixels) recommended for the VMZ-R series.

Detection of 0.1 mm Transparent Layer

Designed to detect the surfaces of thin transparent materials, the TTL Laser AF offers high speed and high accuracy.

  • *Not available for Type A
[fig.]
Focus on top surface in red
[fig.]
Focus on bottom surface in blue
[fig.]
TTL Laser AF
The sensor detects laser beams reflected on both top and bottom surfaces.

8-segment LED Ring Illuminator

Standard magnification zooming heads (Type 1-3) come with 8-segment LED inner and outer ring illuminators, as well as episcopic and diascopic illuminators. Light intensity can be easily adjusted by changing the illumination angles of the 8-segment LED Ring Illuminator.

  • *The angles of the 8-segment ring illuminator for Type 4 is 50 degrees and for Type A is 18 degrees.

Faster Throughput

High rate of data transfer combined with fast illumination control provides faster throughput.

15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (available for Type 1, 2, 3, 4).

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0.5x
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1x
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2x
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4x
[fig.]
7.5x

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