| Measurement optical system |
Focus Variation with White Light Interferometry (FVWLI) |
| Height resolution (algorithm) |
1 pm (0.001 nm) |
| Step height measurement reproducibility |
σ: 8 nm / 8 μm step height measurement |
| Number of pixels |
2046 x 2046, 1022 x 1022 (selectable via software) |
| Height measurement time |
19 s, 8 s / 10 μm scan |
| Height measurement range |
< 90 μm |
< 20 mm |
< 90 μm |
< 20 mm |
| Measurement field size (using 2.5X) |
< 4448 x 4448 μm * |
| Piezo actuator |
Objective lens driven |
Nosepiece driven |
| Z axis |
Manual |
Electric |
Manual |
Electric |
| XY axis |
Manual |
Electric |
Manual |
Electric |
| Software |
BridgelementsR software modules |
