In-line, automated dimensional measurement systems from the “NEXIV” series range

Nikon Introduces the CNC video measurement system “NEXIV VMZ-S4540” and “NEXIV VMZ-S6555”

June 2, 2021

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NEXIV VMZ-S6555

Nikon is pleased to announce the release of the “NEXIV” CNC Video Measuring System model range, “VMZ-S4540” and “VMZ-S6555” suitable for in-line, automated dimensional measurement.

The CNC video measurement system “NEXIV” can automatically measure the dimensions of component features using Nikon's world renowned optical and image processing technology. By analyzing the captured image of a component, detecting feature edges at high speed, both accurately and with repeatably, it is possible to quickly measure components with simple and complex features.

With the growth in demand for measuring smaller components with higher performance, and with the increase in the huge number of electronic components installed in automobiles, there is a greater need for video measuring systems to measure more components at higher speeds in the automated production lines.
The “NEXIV VMZ-S” series has realized this increased throughput by maintaining and enhancing the performance of the previous model, the “NEXIV VMZ-R” series. In November 2020, Nikon released the first in the lineup of new VMZ-S systems, the “VMZ-S3020”, which is part of the fourth generation of the “NEXIV” series. The “VMZ-S4540” and “VMZ-S6555” now join and expand this line-up, and are perfect solutions for medium and large components or for loading multiple components.

Now that the full line-up of “NEXIV VMZ-S” series is available, it is possible to select the most suitable machine according to a customer’s applications and installation environment. In addition, by utilizing the “Remote Control SDK” software (optional), multiple “NEXIV” systems can be integrated into the production line and systems can be accessed and operated remotely.

Product Information

Product Name CNC Video Measuring System “NEXIV VMZ-S4540”
Availability From June 2, 2021
Product Name CNC Video Measuring System “NEXIV VMZ-S6555”
Availability From June 2, 2021

Key Features

1. Improvement of Throughput

The NEXIV systems obtain the highest level of measurement accuracy using an exceptional stage featuring high-precision linear encoders. The “NEXIV VMZ-S” series is capable of capturing and processing images at higher speeds than its predecessor the “NEXIV VMZ-R” series. This has made it possible to reduce the component measurement cycle times without any compromise in accuracy or reproducibility.

2. High Quality Images and Accurate Measurement Data

Nikon has designed an optimized optical system to deliver high quality images and accurate measurement data from within the field of view. With a movable LED ring light and an 8-segment LED illumination, it is possible to resolve and capture the edges of complex shapes. In addition, a high-speed laser, scanning at 1000 points/sec can acquire the cross-sectional profile across a surface and evaluate the relative heights. This meets the surface quality and feature measurement needs across a wide variety of samples.

3. Advanced Usability

The measurement software environment of “AutoMeasure” realizes high accuracy, high speed, and delivers simple measurement functions. A large library of valuable tools is available to use in a user-friendly GUI. For simple components, a support function will automate part of the measurement programming process.
The joystick unit used to move the stage and measurement head has also been redesigned for even greater ease of use for the operator.

4. Control Multiple “NEXIV” Systems Remotely Using “Remote Control SDK”

Up to 10 “NEXIV” systems can be controlled remotely by using “Remote Control SDK” (optional), enabling centralized management and distribution of measurement programs and results all from one place. By controlling “NEXIV” and measurement programs from a remote location away from the production line, such as a control room or office, manpower can be streamlined, and productivity improved.

5. Realizing Automatic Component Loading and Measurement by Integrating “NEXIV” with an Automated Carrier System

With the increasing demand for full automation of the production line especially within the semiconductor industry, the need for automated measurement solution is also increasing. By combining the “NEXIV VMZ-S” series with in-house or 3rd party automatic wafer loader systems, the process of loading wafers and feature measurement can be efficiently automated.

Illustrative example of “NEXIV” operation using “Remote Control SDK”

Main Specifications

NEXIV VMZ- S4540 NEXIV VMZ- S6555
XYZ strokes 450 x 400 x 200 mm
(Type TZ with low magnification lens: 400 x 400 x 200)
650 x 550 x 200 mm
(Type TZ with low magnification lens: 600 x 550 x 200)
Minimum readout 0.01 µm
Maximum sample weight 40 kg (Accuracy guaranteed: 20 kg) 50 kg (Accuracy guaranteed: 30 kg)
Maximum permissible error (L: Length in mm) EUX, MPE, EUY, MPE: 1.2 + 4L / 1000 µm
EUXY, MPE: 2.0 + 4L / 1000 µm
EUZ, MPE: 1.2 + 5L / 1000 µm
Camera Black and white / color 1/3-inch CMOS
Optical magnification and FOV size on stage*1
  • Type 1: (0.5 to 7.5 x ・ 9.33 x 7 to 0.622 x 0.467 mm)
  • Type 2: (1 to 15 x ・ 4.67 x 3.5 to 0.311 x 0.233 mm)
  • Type 3: (2 to 30 x ・ 2.33 x 1.75 to 0.155 x 0.117 mm)
  • Type 4: (4 to 60 x ・ 1.17 x 0.88 to 0.078 x 0.058 mm)
  • Type TZ: (1 to 120 x ・ 4.67 x 3.5 to 0.039 x 0.029 mm)
  • Type A: (0.35 to 3.5x ・ 13.3 x 10 to 1.33 x 1 mm)
Autofocus Laser AF (Type A is optional), Image AF
Illumination*1 -Types 1-4: Vertical epi-illumination, transmission, 8-segment ring illumination (All systems white LED light source / type 1, 2, 3 have 3 angles, type 4 has 1 angle)
-Type TZ: Vertical epi-illumination, transmission, darkfield illumination
-Type A: Vertical epi-illumination, transmission, 8-segment ring lighting (all systems white LED light source / angle)
Power source and power consumption AC100-240V, 50 / 60Hz / 4A - 2A
Dimensions (W x D x H) and weight Main body with table: 1000 x 1340 x 1818 mm / approx. 510 kg
Controller: 190 x 450 x 450 mm / approx. 12 kg
Main body with table: 1200 x 1640 x 1818 mm / approx. 740 kg
Controller: 190 x 450 x 450 mm / approx. 12 kg
Installation dimensions (W x D)*2 3000 x 3000 mm 3200 x 3200 mm

The information is current as of the date of publication. It is subject to change without notice.