Standard Stroke Model

NEXIV VMZ-S3020

High Accuracy / High Speed / High Usability

Magnification, AF and illumination conditions can be finely adjusted for each sample. Suitable for small components used for products such as mechanical, electric/electronic, automotive, and medical devices.

NEXIV VMZ-S New Features
Six Types of Optical Zooming Head
Detection of 0.1 mm Transparent Layer
8-segment LED Ring Illuminator
15x High-speed Zoom

NEXIV VMZ-S New Features

High accuracy within the field of view (FOV)

Accuracy within FOV (P_F2D,P_FV2D) is specified. Nikon designed optics deliver high-quality images and realize accurate measurement data.

Probing error_* P_F2D 0.8 μm
*Type2 zooming head. Determined by Nikon in-house measurement method. Measurement of the perimeter of circular reference device. It involves stage movement with caliper within the FOV is evenly placed at 25 points on the perimeter.

Probing error of the imaging probe_* P_FV2D 0.3 μm
*Type2 zooming head. Determined by Nikon in-house measurement method. Measurement of 25 points that are evenly placed on the perimeter of circular device at one location on the screen (without stage movement).

Improvement of the throughput

Throughput has improved by realizing faster short-distance stage movements. This contributes to the shortening of the measurement time.

New design

Along with the exterior design change, the joystick used for stage and optical head movements has been redesigned to make the operation easier and less tiring during long use.

Six Types of Optical Zooming Head

Standard magnification zooming heads: Type 1, 2, 3

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.

High magnification zooming heads: Type 4 and Type TZ

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.

Wide field-of-view zooming head: Type A

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.

Magnification vs. Field of view (mm)

Standard magnification zooming heads

Type 1
Optical magnification	0.5×	1×	2×	4×	7.5×
Total magnification	18×	36×	72×	144×	270×
Field of View (mm)	9.33 × 7.01	4.7 × 3.5	2.33 × 1.75	1.165 × 0.875	0.622 × 0.467

Type 2
Optical magnification	1×	2×	4×	8×	15×
Total magnification	36×	72×	144×	288×	540×
Field of View (mm)	4.7 × 3.5	2.33 × 1.75	1.165 × 0.875	0.582 × 0.437	0.311 × 0.233

Type 3
Optical magnification	2×	4×	8×	16×	30×
Total magnification	72×	144×	288×	576×	1080×
Field of View (mm)	2.33 × 1.75	1.165 × 0.875	0.582 × 0.437	0.291 × 0.218	0.155 × 0.117

High magnification zooming heads

Type 4
Optical magnification	4×	8×	16×	32×	60×
Total magnification	144×	288×	576×	1152×	2160×
Field of View (mm)	1.165 × 0.875	0.582 × 0.437	0.291 × 0.218	0.146 × 0.109	0.07 × 0.068

Type TZ
Optical magnification	1×	2×	4×	7.5×	16×	32×	64×	120×
Total magnification	36×	72×	144×	270×	576×	1152×	2304×	4320×
Field of View (mm)	4.7 × 3.5	2.33 × 1.75	1.165 × 0.875	0.622 × 0.467	0.291 × 0.218	0.146 × 0.109	0.073 × 0.055	0.039 × 0.029

Wide field-of-view zooming head

Type A
Optical magnification	0.35×	0.6×	1×	1.8×	3.5×
Total magnification	12.6×	21.6×	36×	64.8×	126×
Field of View (mm)	13.3 × 10	7.8 × 5.8	4.7 × 3.5	2.6 × 1.9	1.33 × 1

*Total magnification is that of a video window with 640 × 480 pixels on a 24-inch WUXGA monitor (1920 × 1200 pixels) recommended for the VMZ-S series.

Detection of 0.1 mm Transparent Layer

Designed to detect the surfaces of thin transparent materials, the TTL Laser AF offers high speed and high accuracy.

*Not available for Type A

[fig.] — Focus on bottom surface in blue

[fig.] — TTL Laser AF
The sensor detects laser beams reflected on both top and bottom surfaces.

8-segment LED Ring Illuminator

Standard magnification zooming heads (Type 1-3) come with 8-segment LED inner and outer ring illuminators, as well as episcopic and diascopic illuminators. Light intensity can be easily adjusted by changing the illumination angles of the 8-segment LED Ring Illuminator.

*The angles of the 8-segment ring illuminator for Type 4 is 50 degrees and for Type A is 18 degrees.

15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (available for Type 1, 2, 3, 4).