White Light Interferometric Microscope Systems

  1. Key Features
  2. Measurement capability
  3. Traceability
  4. Specifications/Dimensions

Accurate sub-nano-surface profiler with non-contact measurement

Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.



Superior measurement performance

  • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
  • Enables measurements with the same height resolution in a wide range of magnifications.
  • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
  • Captures both an all-in-focus image and a surface height image.

Wide range of observation methods

  • The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible.