Lineup
Flat panel displays render images with breathtaking sharpness. The Nikon lineup includes models that support the world's largest plate size, bolstering the global manufacturing of crystalline displays.
FX-103SH/103S
Performance
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| FX-103SH | FX-103S | |
|---|---|---|
| Resolution (L/S) | 2.2 µm | 3.0 µm |
| Light source | Mercury lamp | |
| Wavelength | g+h+i-line | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.5 µm | |
| Plate size | 2,940 mm × 3,370 mm | |
| Takt time | 60 s/plate Conditions: 2,940 mm × 3,370 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
|
FX-88SL/FX-88SLD
Performance
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| FX-88SL | FX-88SLD | |
|---|---|---|
| Resolution (L/S) | 1.5 µm | 2.5 µm |
| Light source | UV-LED | |
| Wavelength | i-line equivalent | i-line+h-line equivalent |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.3 µm | |
| Plate size | 2,290 mm × 2,620 mm | |
| Takt time | 39 s/plate Conditions: 2,290 mm × 2,620 mm, 4-scan, i-line, 30 mJ/cm2 |
39 s/plate Conditions: 2,290 mm × 2,620 mm, 4-scan, i-line + h-line, 30 mJ/cm2 |
FX-88S
Performance
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| Resolution (L/S) | 1.5 µm |
|---|---|
| Light source | Mercury lamp |
| Wavelength | i-line |
| Projection magnification | 1:1 |
| Overlay | ≦ ±0.4 µm |
| Plate size | 2,290 mm × 2,620 mm |
| Takt time | 47 s/plate Conditions: 2,200 mm × 2,500 mm, 4 scans, i-line, 30 mJ/cm2 |
FX-6AS
Performance
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| Resolution (L/S) | 1.0 µm*1 |
|---|---|
| Light source | Mercury lamp |
| Wavelength | i-line |
| Projection magnification | 1:1 |
| Overlay | ≦ ±0.23 µm |
| Plate size | 1,500 mm × 1,850 mm |
| Takt time | 42 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2 |
- *1When using a phase shift mask
FX-68SH/68S
Performance
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| FX-68SH | FX-68S | |
|---|---|---|
| Resolution (L/S) | 1.2 µm*1 | 1.5 µm |
| Light source | Mercury lamp | |
| Wavelength | i-line | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.27 µm | |
| Plate size | 1,500 mm × 1,850 mm | |
| Takt time | 42 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2 |
|
- *1When using a phase shift mask
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