Lineup

Flat panel displays render images with breathtaking sharpness. The Nikon lineup includes models that support the world’s largest plate size, bolstering the global manufacturing of crystalline displays.

  FX-103SH FX-103S
Resolution (L/S) 2.2 µm (g+h+i-line) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Plate size 2,940 mm × 3,370 mm
Takt time 60 s/plate
Conditions: 2,940 mm × 3,370 mm, 4 scans, g+h+i-line, 30 mJ/cm2
  FX-86SH2 FX-86S2
Resolution (L/S) 2.2 µm (g+h+i-line) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Plate size 2,200 mm × 2,500 mm
Takt time 49 s/plate
Conditions: 2,200 mm × 2,500 mm, 4 scans, g+h+i-line, 30 mJ/cm2
  FX-68SH FX-68S
Resolution (L/S) 1.2 µm*1 (i-line) 1.5 µm (i-line)
Projection magnification 1:1
Overlay ≦ ±0.27 µm
Plate size 1,500 mm × 1,850 mm
Takt time 42 s/plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2
  FX-67S2 FX-67S
Resolution (L/S) 2.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Plate size 1,500 mm × 1,850 mm
Takt time 57 s/plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
61 s/plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
  FX-66S2 FX-66S
Resolution (L/S) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.6 µm
Plate size 1,500 mm × 1,850 mm
Takt time 53 s/plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
55 s/plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2

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