Rayfact RF Variable Magnification Series

  • Magnification scale
  • Image size
  • F Number
  • -1x – -6x
  • Φ82 mm
  • F1.8
  • Φ86.4 mm
  • F2.5
  • F2.8

Features

  • Optical design with floating mechanism to minimize performance variations across the variable magnification range
  • Compatible with high-resolution large line sensor cameras (3.5 µm x 23K, 5 µm x 16K)
  • Optimized optical system prisms designed for incident illumination on the object side
  • Equipped with a rotating mechanism to align the optimal performance area with line sensors
  • Optional adapter barrels available to support different camera mounts

Applications

  • Defect inspections in flat panel display (FPD) manufacturing processes
  • Microscopic pattern inspections of semiconductor wafers and advanced substrate RDLs
  • Defect inspections of high-performance materials and electronic components

Specifications

Rayfact RF3-6x

Main Specifications

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Product Rayfact RF3-6x
Model BA01941
Focal length [mm] 108.1 (-3x)
Magnification range -3x – -6x
F Number (∞) F1.8
Wavelength range [nm] 400 – 700
Image circle [mm] Φ82
Mount size*3 M67 (P=0.75)
Diameter/length [mm]*1 Φ110 x 166 – 160 (from mount datum face)
Weight [g] Approximately 2,500

Optical Specifications

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Magnification -3x -3.5x -4x -4.5x -5x -5.5x -6x
NA ≧0.2
Object-to-image distance [mm] 582.3 628.6 676.5 725.3 774.7 824.6 875.0
Working distance [mm] 83.5 78.5 74.8 72.0 69.7 67.9 65.7
Flange-to-image distance [mm] 332.8 385.9 438.8 491.6 544.2 596.7 649.3
Distortion [%]*2 +0.1 +0.1 +0.1 +0.1 +0.0 +0.0 +0.0
Relative illumination [%]*2 91.6 95.1 97.3 98.5 98.9 99.1 99.2
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=41 mm) and F1.8.
  • *3To attach to a camera, use the appropriate extension barrel and camera mount parts that fit the camera mount.

Rayfact RF3-6x Prism-type

Main Specifications

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Product Rayfact RF3-6x Prism-type
Model BA01951
Focal length [mm] 108.1 (-3x)
Magnification range -3x – -6x
F Number (∞) F1.8
Wavelength range [nm] 400 – 700
Image circle [mm] Φ82
Mount size*3 M67 (P=0.75)
Diameter/length [mm]*1 Φ110 x 166.1 – 160 (from mount datum face)
Weight [g] Approximately 2,450

Optical Specifications

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Magnification -3x -3.5x -4x -4.5x -5x -5.5x -6x
NA ≧0.2
Object-to-image distance [mm] 593.3 640.1 688.3 737.5 787.3 837.5 888.3
Working distance [mm] 93.3 88.3 84.6 81.7 79.4 77.6 75.5
Flange-to-image distance [mm] 333.9 387.4 440.7 493.9 546.9 599.8 652.7
Distortion [%]*2 +0.1 +0.1 +0.1 +0.0 +0.0 +0.0 +0.0
Relative illumination [%]*2 91.7 95.2 97.4 98.5 98.9 99.0 99.2
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=41 mm) and F1.8.
  • *3To attach to a camera, use the appropriate extension barrel and camera mount parts that fit the camera mount.

Rayfact RF2-5x

Main Specifications

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Product Rayfact RF2-5x
Model L-OVM50167MN
Focal length [mm] 116.2 (-2x)
Magnification range -2x – -5x
F Number (∞) F2.5
Wavelength range [nm] 400 – 700
Image circle [mm] Φ86.4
Mount size*3 M67 (P=0.75)
Attachment size M58 (P=0.75)
Diameter/length [mm]*1 Φ84 x 140 (from mount datum face)
Weight [g] Approximately 1,350

Optical Specifications

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Magnification -2x -2.5x -3x -3.5x -4x -4.5x -5x (-5.2x)*4
NA ≧0.1
Object-to-image distance [mm] 503.6 550.4 601.0 653.8 707.9 763.0 818.7 (841.1)
Working distance [mm] 114.7 102.8 94.9 89.2 84.9 81.6 79.0 (78.1)
Flange-to-image distance [mm] 248.8 307.5 366.1 424.6 483.0 541.4 599.8 (623.1)
Distortion [%]*2 +0.1 +0.0 -0.0 -0.0 -0.0 -0.0 -0.0 (-0.0)
Relative illumination [%]*2 90.5 95.4 98.1 99.2 99.5 99.6 99.7 (99.7)
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=43.2 mm) and F2.5.
  • *3To attach to a camera, use the appropriate extension barrel and camera mount parts that fit the camera mount.
  • *4-5.2x is the value when the entire lens is extended with the reference set to -5x.

Rayfact RF2-5x Prism-type

Main Specifications

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Product Rayfact RF2-5x Prism-type
Model L-OVM50170MN-BS
Focal length [mm] 117.3 (-2x)
Magnification range -2x – -5x
F Number (∞) F2.5
Wavelength range [nm] 400 – 700
Image circle [mm] Φ86.4
Mount size*3 M67 (P=0.75)
Attachment size M58 (P=0.75)
Diameter/length [mm]*1 Φ84 x 140 (from mount datum face)
Weight [g] Approximately 1,350

Optical Specifications

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Magnification -2x -2.5x -3x -3.5x -4x -4.5x -5x (-5.2x)*4
NA ≧0.1
Object-to-image distance [mm] 513.7 561.0 612.1 665.4 720.1 775.7 831.9 (854.5)
Working distance [mm] 119.8 107.8 99.8 94.0 89.7 86.4 83.7 (82.8)
Flange-to-image distance [mm] 253.9 313.2 372.3 431.4 490.3 549.3 608.3 (631.8)
Distortion [%]*2 +0.1 -0.0 -0.0 -0.1 -0.1 -0.1 -0.1 (-0.0)
Relative illumination [%]*2 88.2 93.3 96.2 97.5 98.1 98.6 99.0 (99.1)
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=43.2 mm) and F2.5.
  • *3To attach to a camera, use the appropriate extension barrel and camera mount parts that fit the camera mount.
  • *4-5.2x is the value when the entire lens is extended with the reference set to -5x.

Rayfact RF1-2x

Main Specifications

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Product Rayfact RF1-2x
Model L-OVM20117MN
Focal length [mm] 104.5 (-1x)
Magnification range -1x – -2x
F Number (∞) F2.8
Wavelength range [nm] 400 – 700
Image circle [mm] Φ86.4
Mount size*3 M67 (P=0.75)
Attachment size M67 (P=0.75)
Diameter/length [mm]*1 Φ90 x 156.8 (from mount datum face)
Weight [g] Approximately 1,750

Optical Specifications

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Magnification -1x -1.2x -1.4x -1.6x -1.8x -2x
NA ≧0.09
Object-to-image distance [mm] 434.9 439.8 449.6 462.5 477.6 494.2
Working distance [mm] 172.0 154.3 141.5 131.7 124.0 117.7
Flange-to-image distance [mm] 106.2 128.7 151.3 174.0 196.8 219.7
Distortion [%]*2 +0.2 +0.1 +0.1 +0.0 -0.0 -0.0
Relative illumination [%]*2 82.9 87.4 90.6 92.8 94.1 94.8
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=43.2 mm) and F2.8.
  • *3To attach to a camera, use the appropriate extension barrel and camera mount parts that fit the camera mount.

Rayfact RF1-2x Prism-type

Main Specifications

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Product Rayfact RF1-2x Prism-type
Model L-OVM20118MN-BS
Focal length [mm] 105.1 (-1x)
Magnification range -1x – -2x
F Number (∞) F2.8
Wavelength range [nm] 400 – 700
Image circle [mm] Φ86.4
Mount size*3 M67 (P=0.75)
Attachment size M67 (P=0.75)
Diameter/length [mm]*1 Φ90 x 156.8 (from mount datum face)
Weight [g] Approximately 1,750

Optical Specifications

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Magnification -1x -1.2x -1.4x -1.6x -1.8x -2x
NA ≧0.09
Object-to-image distance [mm] 443.8 448.7 458.6 464.8 486.7 503.4
Working distance [mm] 179.8 162.1 149.2 139.3 131.6 125.3
Flange-to-image distance [mm] 107.3 129.9 152.6 175.4 198.3 221.4
Distortion [%]*2 +0.2 +0.1 +0.0 +0.0 -0.0 -0.0
Relative illumination [%]*2 82.2 86.8 90.1 92.4 93.8 94.5
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=43.2 mm) and F2.8.
  • *3To attach to a camera, use the appropriate extension barrel and camera mount parts that fit the camera mount.
  • Specifications unless any specific instructions are stated is at the standard magnification.
  • Specifications are subject to change without prior notice.

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