Rayfact TC Series

  • Magnification scale
  • Image size
  • -5x – -10x
  • Φ82 mm
  • Φ64 mm

Features

  • Double telecentric optical system on both the object side and image side
  • Compatible with high-resolution large line sensor cameras (max. 5 µm x 16K, TC5-10x)
  • Straight barrel unit, Köhler illumination unit (TC5-10x), and coaxial illumination unit (Tc5.2x) available
  • TC5-10x variable magnification lens can be customized for fixed magnification
  • Optional adapter mounts available to support different camera mounts

Applications

  • Defect inspections in next-generation FPD manufacturing processes, including micro LEDs
  • Microscopic pattern inspections of semiconductor wafers and next-generation substrate RDLs
  • Visual inspection of materials used in next-generation communications

Specifications

Rayfact TC5-10x Straight barrel type (manufactured to order)

Main Specifications

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Product Rayfact TC5-10x Straight barrel type
Focal length [mm] Telecentric lenses
Magnification range -5x – -10x
Wavelength range [nm] 400 – 700
Image circle [mm] Φ82
Mount size M95 (P=1)
Attachment size M67 (P=0.75)
Diameter/length [mm]*1 Φ145 x 485.1 (from mount datum face)
Weight [g] Approximately 5,700

Optical Specifications

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Magnification -5x -6x -7x -8x -9x -10x
NA ≧0.2
Object-to-image distance [mm] 509.1 509.5 510.6 511.8 513.0 514.2
Working distance [mm] 14.6 15.1 16.1 17.3 18.5 19.7
Flange-to-image distance [mm] 9.4
Distortion [%]*2 +0.0 +0.0 +0.0 +0.1 +0.1 +0.1
Relative illumination [%]*2 102.3 101.3 100.8 100.4 100.2 99.9
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=41 mm) and maximum aperture.

Rayfact TC5-10x Köhler illumination type (manufactured to order)

Main Specifications

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Product Rayfact TC5-10x Köhler illumination type
Focal length [mm] Telecentric lenses
Magnification range -5x – -10x
Wavelength range [nm] 400 – 700
Image circle [mm] Φ82
Mount size M95 (P=1)
Attachment size M67 (P=0.75)
Diameter/length [mm]*1 213 x 120 x 502.2 (from mount datum face)
Weight [g] Approximately 7,700

Optical Specifications

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Magnification -5x -6x -7x -8x -9x -10x
NA ≧0.2
Object-to-image distance [mm] 526.2 526.6 527.6 528.8 530.1 531.3
Working distance [mm] 14.6 15.1 16.1 17.3 18.5 19.7
Flange-to-image distance [mm] 9.4
Distortion [%]*2 +0.0 -0.0 +0.0 +0.1 +0.1 +0.1
Relative illumination [%]*2 102.3 101.3 100.8 100.4 100.2 99.9
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=41 mm) and maximum aperture.

Rayfact TC5.2x

Main Specifications

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Product Rayfact TC5.2x Straight barrel type Rayfact TC5.2x Incident illumination type
Model OFM52275HN-TS OFM52275HN-TP
Focal length [mm] Telecentric lenses
Magnification scale -5.2x
Wavelength range [nm] 510 – 590
Image circle [mm] Φ64
Mount size M72 (P=0.75)
Attachment size M72 (P=0.75)
Diameter/length [mm]*1 Φ145 x 550.7 (from mount datum face) Φ145 x 562.7 (from mount datum face)
Weight [g] Approximately 4,400 Approximately 5,900

Optical Specifications

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NA ≧0.2
Object-to-image distance [mm] 612.1 624.0
Working distance [mm] 54.8 54.8
Flange-to-image distance [mm] 6.56 6.56
Distortion [%]*2 -0.0 +0.0
Relative illumination [%]*2 101.0 101.0
  • *1Dimensions exclude protrusions such as lock screws.
  • *2Value at maximum image height (Y'=32 mm) and maximum aperture.
  • Specifications unless any specific instructions are stated is at the standard magnification.
  • Specifications are subject to change without prior notice.

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