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IC Chips / Electronics

Covering lithography systems for producing semiconductors and high-definition FPDs, as well as measuring systems for a variety of electronic components. Also includes various optical glass and optical materials.

Device Production
FPD Lithography Systems
FPD Lithography Systems

For producing panels employed by large-sized TVs and high-definition smart devices

Device Production
Semiconductor Lithography Systems
Semiconductor Lithography Systems

For producing semiconductors employed by cutting-edge processors/memories

Metal Processing
Optical Processing Machine
Optical Processing Machine

From additive manufacturing as a 3D printer, to laser marking and welding

Measurement / Inspection / Analysis
Alignment Station 'Litho Booster'
Alignment Station "Litho Booster"

Realizes high-speed, highly accurate wafer measurement for greatly improved lithography accuracy

Measurement / Inspection / Analysis
Measuring Instruments
Measuring Instruments

For measuring sizes/shapes of precision parts

Measurement / Inspection / Analysis
Video Measuring Systems
Video Measuring Systems

Automated video measurement of sizes/shapes of precision parts

Measurement / Inspection / Analysis
White Light Interferometric Microscope Systems
White Light Interferometric Microscope Systems

Accurate sub-nano-surface profiler with non-contact measurement

Measurement / Inspection / Analysis
3D Laser Scanners
3D Laser Scanners

For non-contact, highly accurate, 3D measurement

Measurement / Inspection / Analysis
X-Ray and CT Systems
X-Ray and CT Systems

For measuring internal/external dimensions without disassembling the product

Measurement / Inspection / Analysis
Industrial Microscopy
Industrial Microscopy

Versatile observation with high optical performance

Measurement / Inspection / Analysis
Metrology/Inspection Systems
Metrology/Inspection Systems

Automatic macro/exterior inspection of IC wafers, Illumination for Imaging Sensor Inspection

Measurement / Inspection / Analysis
Digital Micrometer System "Digimicro"
Digital Micrometer System "Digimicro"

Indication of thickness/differences of parts in units of 0.01µm

Parts / Units
Industrial Lenses
Industrial Lenses

Compatible with high-resolution, large line-sensor cameras

Parts / Units
Absolute Encoders
Absolute Encoders

Sensors capable of detecting absolute rotational displacement values

Parts / Units
Optical Glass
Optical Glass

Optical glass delivering high transparency and superior homogeneity

Parts / Units
Optical Components & Materials
Optical Components & Materials

Optical components (light source, projection lens, etc.) and materials (synthetic silica glass, calcium fluoride, etc.)

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