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IC Chips / Electronics
Covering lithography systems for producing semiconductors and high-definition FPDs, as well as measuring systems for a variety of electronic components. Also includes various optical glass and optical materials.
FPD Lithography Systems
For producing panels employed by large-sized TVs and high-definition smart devices
Semiconductor Lithography Systems
For producing semiconductors employed by cutting-edge processors/memories
Alignment Station "Litho Booster"
Realizes high-speed, highly accurate wafer measurement for greatly improved lithography accuracy
Measuring Instruments
For measuring sizes/shapes of precision parts
CNC Video Measuring Systems
Automated video measurement of sizes/shapes of precision parts
White Light Interferometric Microscope Systems
Accurate sub-nano-surface profiler with non-contact measurement
3D Metrology Systems
For non-contact, highly accurate, 3D measurement
X-ray/CT Inspection Systems
For measuring internal/external dimemsions without disassembling the product
Industrial Microscopes
Versatile observation with high optical performance
Microscope Components
Built-in components for image observation on production lines
Semiconductor Inspection/Wafer Loaders
Automatic macro/exterior inspection of IC wafers
Digital Micrometer System "Digimicro"
Indication of thickness/differences of parts in units of 0.01μm
Absolute Encoders
Sensors capable of detecting absolute rotational displacement values
Optical Materials
Optical materials (synthetic silica glass, calcium fluoride, etc.), optics, and measurement services