3. Accommodating larger glass plates with the multi-lens system
As glass plates become larger each year, allowing a larger number of panels to be cut from them, it becomes necessary to increase productivity so that circuits over a wider area can be patterned with a single exposure.
Nikon developed the multi-lens system based on its unique technologies as the solution to this problem. For efficient exposure, Nikon arranges multiple lenses in two rows that cover a large exposure area. The FX-103SH/103S, the largest Nikon FPD lithography system, has as many as 14 lenses arranged in rows that are precisely controlled to function as one giant lens.