Precision Equipment Business

Supporting the evolution of the information society.

Smart devices, computers and large LCD TVs are indispensable to our everyday life today. And integral to such electronics are IC chips and flat panel displays produced in machines called lithography systems. At Nikon, we possess an integrated business — from development and design to manufacturing, sales and after services — creating these essential systems, and supporting the evolution of the information society.

FPD Lithography Business

FPD lithography systems project circuit patterns onto the surface of glass plates — mother glass for LCD and organic light-emitting diode (OLED) panels. Nikon's machines range from those employing the unique multi-lens projection optical system for handling large panels, to those for producing the small- and medium-sized panels found in smart devices. Providing such diverse machines to the world's leading manufacturers, Nikon is the proud top supplier in numbers of these machines in the global market as of the fiscal year ended in March 2016.

FPD Scanner FX-68S

The FX-68S supports the production of leading-edge, high-resolution, small- and medium-sized panels from Gen 6 plates. The scanner method enables improved productivity, excellent resolution (1.5μm) and high overlay accuracy simultaneously.

FPD Scanner FX-103SH

The 10.5th generation FPD lithography system that has fully enhanced illumination and multi-lens systems that use Nikon’s proprietary resolution enhancement techniques. It is optimized for manufacturing high-definition large-sized panels and mass-production of 4K and 8K TVs, as well as LCD panels for high-definition tablets and organic EL panels.

Semiconductor Lithography Business

Semiconductor lithography systems reduce the size of circuit patterns and project them onto silicon wafers. The systems, crucial to IC chip production, require an extreme precision down to 1 nm (one-billionth of a meter), and are regarded as the most precise machines ever developed. Nikon develops and supplies innovative semiconductor lithography systems, addressing the ever-changing requirements for manufacturing IC chips, that are constantly miniaturizing and increasing in intricacy.

ArF Immersion Scanner NSR-S631E

Employing the Streamlign platform, this scanner was developed for high-volume manufacturing of devices at the 7 nm process node (capable of handling multiple patterning). The super-high accuracy of below 2.3 nm Mix-and-Match Overlay (MMO) and extremely high throughput of more than 270 wafers per hour (96 shots) contribute to stable volume manufacturing at cutting-edge production lines.